公开(公告)号：US20180292122A1

公开(公告)日：2018-10-11

申请号：US15812753

申请日：2017-11-14

申请人： YIELD ENGINEERING SYSTEMS, INC.

发明人： WILLIAM MOFFAT ,  CRAIG WALTER MCCOY

IPC分类号： F25D21/14 ,  F25D19/00

摘要： A trap system adapted to trap polyimide or other vapors exiting from a process chamber. The vapors are routed from the process chamber through a heated exit line at low pressure and then cooled, resulting in condensation at a selected location. The condensed vapors accumulate in a liquid trap. A method of condensing polymer vapors in vacuum exit lines of process chambers, where the flow which may have vaporized polymer vapor is cooled to enhance condensation at a chosen location. The liquid trap can be emptied and replaced, resulting in the removal of the condensed liquid. The chamber exit lines are protected from condensation build up.

公开(公告)号：US20180308732A1

公开(公告)日：2018-10-25

申请号：US15919169

申请日：2018-03-12

申请人： YIELD ENGINEERING SYSTEMS, INC.

发明人： WILLIAM MOFFAT ,  CRAIG WALTER MCCOY

IPC分类号： H01L21/673 ,  H01L21/67 ,  H01L21/02 ,  F27D5/00 ,  F27D1/18

CPC分类号： H01L21/67376 ,  F27D1/1866 ,  F27D5/0037 ,  F27D2007/063 ,  H01L21/02046 ,  H01L21/67034

摘要： A process chamber system adapted for both vacuum process steps and steps at pressures higher than atmospheric pressure. The chamber door may utilize a double door seal which allows for high vacuum in the gap between the seals such that the sealing force provided by the high vacuum in the seal gap is higher than the opposing forces due to the pressure inside the chamber and the weight of the components.

公开(公告)号：US20190287835A1

公开(公告)日：2019-09-19

申请号：US16263953

申请日：2019-01-31

申请人： YIELD ENGINEERING SYSTEMS, INC.

发明人： WILLIAM MOFFAT ,  CRAIG WALTER MCCOY

IPC分类号： H01L21/68 ,  H01J37/32 ,  H01L21/687

摘要： A device and method for alignment of substrates on a substrate support, such as a heated chuck. An alignment ring may be placed over the substrate support to maintain placement and alignment during processing, such as plasma processing. The aligned substrate may then be accessed by a robotic arm, as it is in a pre-determined location. Alignment rings of different interior diameters may be used for different substrate sizes. The alignment rings may be inserted onto and removed from the process oven containing the substrate support through the substrate access port, without the need to fully open the process chamber.

公开(公告)号：US20190314738A1

公开(公告)日：2019-10-17

申请号：US16189631

申请日：2018-11-13

申请人： YIELD ENGINEERING SYSTEMS, INC.

发明人： WILLIAM MOFFAT ,  CRAIG WALTER MCCOY

IPC分类号： B01D5/00

摘要： A trap system adapted to trap polyimide or other vapors exiting from a process chamber. The vapors are routed from the process chamber through a heated exit line at low pressure and then cooled, resulting in condensation at a selected location. The condensed vapors accumulate in a liquid trap. A method of condensing polymer vapors in vacuum exit lines of process chambers, where the flow which may have vaporized polymer vapor is cooled to enhance condensation at a chosen location. The liquid trap can be emptied and replaced, resulting in the removal of the condensed liquid. The chamber exit lines are protected from condensation build up.