发明申请
- 专利标题: DUAL THRESHOLD VOLTAGE (VT) CHANNEL DEVICES AND THEIR METHODS OF FABRICATION
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申请号: US15773536申请日: 2015-12-23
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公开(公告)号: US20180323260A1公开(公告)日: 2018-11-08
- 发明人: Hsu-Yu CHANG , Neville L. DIAS , Walid M. HAFEZ , Chia-Hong JAN , Roman W. OLAC-VAW , Chen-Guan LEE
- 申请人: Intel Corporation
- 国际申请: PCT/US15/00506 WO 20151223
- 主分类号: H01L29/10
- IPC分类号: H01L29/10 ; H01L21/265 ; H01L29/66 ; H01L29/78
摘要:
Embodiments of the present invention are directed to dual threshold voltage (VT) channel devices and their methods of fabrication. In an example, a semiconductor device includes a gate stack disposed on a substrate, the substrate having a first lattice constant. A source region and a drain region are formed on opposite sides of the gate electrode. A channel region is disposed beneath the gate stack and between the source region and the drain region. The source region is disposed in a first recess having a first depth and the drain region disposed in a second recess having a second depth. The first recess is deeper than the second recess. A semiconductor material having a second lattice constant different than the first lattice constant is disposed in the first recess and the second recess.
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