Invention Application
- Patent Title: CONNECTED THREAD GROOVE SPACER AND VACUUM PUMP
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Application No.: US15780155Application Date: 2016-12-08
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Publication No.: US20180355888A1Publication Date: 2018-12-13
- Inventor: Yoshiyuki Sakaguchi , Tooru Miwata , Kengo Saegusa , Nahoko Yoshihara
- Applicant: Edwards Japan Limited
- Priority: JP2015-240009 20151209
- International Application: PCT/JP2016/086591 WO 20161208
- Main IPC: F04D29/54
- IPC: F04D29/54 ; F04D19/04

Abstract:
A thread groove pump portion, which is an exhaust element, is structured such that a Siegbahn structure is attached onto a cylindrical thread, and such that respective parts are connected to each other at this attachment section. A flow channel of the Siegbahn portion and a flow channel of the cylindrical thread (the thread groove pump portion) are connected to each other so as to substantially form a right angle when viewed from an axis direction of the vacuum pump, thus, the flow channel of the Siegbahn portion and the flow channel of the thread groove pump portion are connected to each other. the length of a compression flow channel of the thread groove pump portion can be increased in a radial direction due to the connected Siegbahn portion.
Public/Granted literature
- US10823200B2 Connected thread groove spacer and vacuum pump Public/Granted day:2020-11-03
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