Invention Application
- Patent Title: MULTIPLE ELECTRODE SUBSTRATE SUPPORT ASSEMBLY AND PHASE CONTROL SYSTEM
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Application No.: US16113736Application Date: 2018-08-27
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Publication No.: US20180366306A1Publication Date: 2018-12-20
- Inventor: Yang YANG , Kartik RAMASWAMY , Steven LANE , Lawrence WONG , Shahid RAUF , Andrew NGUYEN , Kenneth S. COLLINS , Roger Alan LINDLEY
- Applicant: Applied Materials, Inc.
- Main IPC: H01J37/32
- IPC: H01J37/32

Abstract:
Implementations described herein provide a substrate support assembly which enables tuning of a plasma within a plasma chamber. In one embodiment, a method for tuning a plasma in a chamber is provided. The method includes providing a first radio frequency power and a direct current power to a first electrode in a substrate support assembly, providing a second radio frequency power to a second electrode in the substrate support assembly at a different location than the first electrode, monitoring parameters of the first and second radio frequency power, and adjusting one or both of the first and second radio frequency power based on the monitored parameters.
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