Invention Application
- Patent Title: METHOD FOR MANUFACTURING MAGNETORESISTIVE ELEMENT
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Application No.: US16008659Application Date: 2018-06-14
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Publication No.: US20180366641A1Publication Date: 2018-12-20
- Inventor: Hiroki MAEHARA , Naoki WATANABE , Kanto NAKAMURA
- Applicant: Tokyo Electron Limited
- Priority: JP2017-118845 20170616
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L43/10

Abstract:
A method for manufacturing a magnetoresistive element, includes: a first step of preparing a wafer including a first ferromagnetic layer and a first oxide layer provided directly on the first ferromagnetic layer; a second step of forming, after the first step, a second ferromagnetic layer directly on the first oxide layer; a third step of forming, after the second step, an absorbing layer directly on the second ferromagnetic layer; and a fourth step of crystallizing, after the third step, the second ferromagnetic layer by heat treatment. The second ferromagnetic layer contains boron, and the absorbing layer contains a material for absorbing boron from the second ferromagnetic layer by the heat treatment in the fourth step.
Public/Granted literature
- US10566525B2 Method for manufacturing magnetoresistive element Public/Granted day:2020-02-18
Information query
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