Invention Application
- Patent Title: APPARATUSES AND METHODS FOR FORMING MULTIPLE DECKS OF MEMORY CELLS
-
Application No.: US16111762Application Date: 2018-08-24
-
Publication No.: US20190013329A1Publication Date: 2019-01-10
- Inventor: Zhenyu Lu , Roger W. Lindsay , Akira Goda , John Hopkins
- Applicant: Micron Technology, Inc.
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L21/02 ; G11C16/26 ; H01L27/11556 ; H01L27/1157 ; H01L27/11524 ; G11C16/34 ; G11C16/04 ; H01L27/11573 ; H01L27/11529 ; G11C16/14

Abstract:
Some embodiments include apparatuses and methods having multiple decks of memory cells and associated control gates. A method includes forming a first deck having alternating conductor materials and dielectric materials and a hole containing materials extending through the conductor materials and the dielectric materials. The methods can also include forming a sacrificial material in an enlarged portion of the hole and forming a second deck of memory cells over the first deck. Additional apparatuses and methods are described.
Public/Granted literature
- US10340287B2 Apparatuses and methods for forming multiple decks of memory cells Public/Granted day:2019-07-02
Information query
IPC分类: