Invention Application
- Patent Title: ELECTROSTATIC CHUCK
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Application No.: US16131245Application Date: 2018-09-14
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Publication No.: US20190019715A1Publication Date: 2019-01-17
- Inventor: Jumpei UEFUJI , Hitoshi SASAKI , Kosuke YAMAGUCHI , Kengo MAEHATA , Yuichi YOSHII
- Applicant: TOTO LTD.
- Priority: JP2016-049902 20160314; JP2017-010353 20170124
- Main IPC: H01L21/683
- IPC: H01L21/683 ; B32B18/00

Abstract:
An electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a heater plate. The heater plate is provided between the ceramic dielectric substrate and the base plate. The heater plate includes first and second support plates, first and second resin layers, and a heater element. Each of the first and second resin layers is provided between the first support plate and the second support plate. The heater element includes first and second electrically conductive portions. The first electrically conductive portion is provided between the first resin layer and the second resin layer. The second electrically conductive portion is separated from the first electrically conductive portion in an in-plane direction. The first resin layer contacts the second resin layer between the first electrically conductive portion and the second electrically conductive portion.
Public/Granted literature
- US10923382B2 Electrostatic chuck Public/Granted day:2021-02-16
Information query
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