公开(公告)号：US20240339351A1

公开(公告)日：2024-10-10

申请号：US18745262

申请日：2024-06-17

Applicant: TOTO LTD.

Inventor： Yutaka MOMIYAMA ,  Hitoshi SASAKI

IPC: H01L21/683 ,  B32B7/12 ,  B32B9/00 ,  B32B9/04 ,  B32B15/04 ,  B32B15/08 ,  C23C14/06 ,  C23C14/08

CPC classification number: H01L21/6833 ,  B32B7/12 ,  B32B9/005 ,  B32B9/041 ,  B32B9/045 ,  B32B15/04 ,  B32B15/08 ,  C23C14/0635 ,  C23C14/0641 ,  C23C14/08 ,  B32B2307/54 ,  B32B2307/542

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a bonding layer provided between the ceramic dielectric substrate and the base plate. At least one of the following first to sixth conditions is satisfied: First condition: An elongation percentage α1 is not less than 120%; Second condition: A ratio α1/α2 of the elongation percentage is not less than 0.60; Third condition: A bonding strength β1 is not less than 0.4 MPa and not more than 10 MPa; Fourth condition: A ratio β1/β2 of the bonding strength is not less than 0.6 and not more than 10; Fifth condition: An elastic modulus γ1 is not less than 0.1 MPa and not more than 10 MPa; Sixth condition: A ratio γ1/γ2 of the elastic modulus is not less than 0.6 and not more than 30.

公开(公告)号：US20200312694A1

公开(公告)日：2020-10-01

申请号：US16829738

申请日：2020-03-25

Applicant: TOTO LTD.

Inventor： Yutaka MOMIYAMA ,  Hitoshi SASAKI

IPC: H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a bonding layer provided between the ceramic dielectric substrate and the base plate. At least one of the following first to sixth conditions is satisfied: First condition: An elongation percentage α1 is not less than 120%; Second condition: A ratio α1/α2 of the elongation percentage is not less than 0.60; Third condition: A bonding strength ƒ1 is not less than 0.4 MPa and not more than 10 MPa; Fourth condition: A ratio β1/β2 of the bonding strength is not less than 0.6 and not more than 10; Fifth condition: An elastic modulus γ1 is not less than 0.1 MPa and not more than 10 MPa; Sixth condition: A ratio γ1/γ2 of the elastic modulus is not less than 0.6 and not more than 30.

公开(公告)号：US20200303231A1

公开(公告)日：2020-09-24

申请号：US16825256

申请日：2020-03-20

Applicant: TOTO LTD.

Inventor： Hitoshi SASAKI ,  Yutaka MOMIYAMA

IPC: H01L21/683 ,  H01L21/3065 ,  H01L21/67 ,  H01L21/687 ,  B23Q3/15 ,  C23C16/458

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate has first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer has a first surface at the first major surface side and a second surface at a side opposite to the first surface. The first electrode layer includes a first portion including the first surface. The first electrode layer includes a ceramic component and a metal component. A concentration of the ceramic component in the first portion is higher than an average concentration of the ceramic component in the first electrode layer.

公开(公告)号：US20200035538A1

公开(公告)日：2020-01-30

申请号：US16523634

申请日：2019-07-26

Applicant: TOTO LTD.

Inventor： Yutaka MOMIYAMA ,  Hitoshi SASAKI

IPC: H01L21/683 ,  H01L21/687 ,  H02N13/00 ,  B23Q3/15

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric, a base plate, a first electrode layer, and a second electrode layer. The ceramic dielectric substrate has a first major surface and a second major surface. The first electrode layer is provided between the first major surface and the second major surface. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer has a first surface and a second surface. A distance between the first surface and the first major surface is constant. A distance between the second surface and the first surface at an end portion of the first electrode layer is shorter than a distance between the second surface and the first surface at a central portion of the first electrode layer.

公开(公告)号：US20210074572A1

公开(公告)日：2021-03-11

申请号：US17009432

申请日：2020-09-01

Applicant: TOTO LTD.

Inventor： Yutaka MOMIYAMA ,  Minoru SUZUKI ,  Hitoshi SASAKI ,  Tsukasa SHIGEZUMI

IPC: H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. A distance between the third surface and the first major surface is constant. A thickness of the second portion between the third and fourth surfaces varies such that the thickness at a circumferential end portion of the second portion which is less than that at a central portion of the second portion.

公开(公告)号：US20190013231A1

公开(公告)日：2019-01-10

申请号：US16131818

申请日：2018-09-14

Applicant: TOTO LTD.

Inventor： Kosuke YAMAGUCHI ,  Yuichi YOSHII ,  Hitoshi SASAKI ,  Kengo MAEHATA

IPC: H01L21/683 ,  B23Q3/15 ,  H01L21/67

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate having a first major surface placing an object to be processed and a second major surface on an opposite side of the first major surface, and a base plate provided on a side of the second major surface and supporting the ceramic dielectric substrate. The base plate includes a first communicating passage passing a medium which adjusts a temperature of the object to be processed. The first communicating passage has an upper surface, a side surface, and a lower surface. A ratio of variation of a maximum height Sz in the upper surface to a height of the first communicating passage is not more than 1%.

公开(公告)号：US20210074571A1

公开(公告)日：2021-03-11

申请号：US17009365

申请日：2020-09-01

Applicant: TOTO LTD.

Inventor： Yutaka MOMIYAMA ,  Minoru SUZUKI ,  Hitoshi SASAKI ,  Tsukasa SHIGEZUMI

IPC: H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. A distance between the fourth surface and the first major surface is constant. A thickness of the second portion between the third and fourth surfaces varies such that the thickness at a circumferential end portion of the second portion which is less than that at a central portion of the second portion.

公开(公告)号：US20210074525A1

公开(公告)日：2021-03-11

申请号：US17009216

申请日：2020-09-01

Applicant: TOTO LTD.

Inventor： Yutaka MOMIYAMA ,  Minoru SUZUKI ,  Hitoshi SASAKI ,  Tsukasa SHIGEZUMI

IPC: H01J37/32 ,  H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and first and second electrode layers. The ceramic dielectric substrate includes first and second major surfaces. The first and second electrode layers are provided inside the ceramic dielectric substrate. The second electrode layer is provided between the first electrode layer and the first major surface. The first electrode layer includes first and second portions. The first portion is positioned more centrally of the ceramic dielectric substrate than is the second portion. The first portion includes first and second surfaces. The second portion includes third and fourth surfaces. The third surface is positioned between the first surface and the second electrode layer. An electrical resistance of the first surface is greater than an average electrical resistance of the first portion.

公开(公告)号：US20200035468A1

公开(公告)日：2020-01-30

申请号：US16523686

申请日：2019-07-26

Applicant: TOTO LTD.

Inventor： Yutaka MOMIYAMA ,  Hitoshi SASAKI

IPC: H01J37/32 ,  H01L21/683

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a first electrode layer. The ceramic dielectric substrate has a first major surface and a second major surface. The first electrode layer is provided inside the ceramic dielectric substrate and connected to a high frequency power supply. The first electrode layer is provided between the first major surface and the second major surface. The first electrode layer has a first surface and a second surface. The first electrode layer includes a first region including the first surface, a second region including the second surface, and a third region positioned between the first region and the second region. A porosity of the first region is lower than a porosity of the third region.

公开(公告)号：US20190148206A1

公开(公告)日：2019-05-16

申请号：US16249397

申请日：2019-01-16

Applicant: TOTO LTD.

Inventor： Kosuke YAMAGUCHI ,  Hitoshi SASAKI ,  Kengo MAEHATA ,  Shumpei KONDO ,  Yuichi YOSHII

IPC: H01L21/683 ,  H01L21/67

Abstract: According to an aspect of the invention, an electrostatic chuck includes: a ceramic dielectric substrate having a first major surface, and a second major surface on a side opposite to the first major surface; a base plate supporting the ceramic dielectric substrate and being provided at a position separated from the ceramic dielectric substrate; and a heater plate provided between the ceramic dielectric substrate and the base plate, the heater plate including a first support plate including a metal, a heater element emitting heat due to a current flowing, and a first resin layer provided between the first support plate and the heater element, the heater element having a first surface and a second surface, the first surface opposing the first resin layer, the second surface facing a side opposite to the first surface, a width of the first surface being different from a width of the second surface.