Invention Application
- Patent Title: SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
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Application No.: US16121708Application Date: 2018-09-05
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Publication No.: US20190019895A1Publication Date: 2019-01-17
- Inventor: Shunpei YAMAZAKI , Miyuki HOSOBA , Junichiro SAKATA , Hideaki KUWABARA
- Applicant: Semiconductor Energy Laboratory Co., Ltd.
- Priority: JP2009-180077 20090731
- Main IPC: H01L29/786
- IPC: H01L29/786 ; G02F1/1362 ; H01L27/12 ; H01L29/45 ; H01L29/51 ; H01L29/66 ; G02F1/1343 ; G02F1/1368 ; G02F1/167 ; G02F1/136 ; H01L27/32 ; G02F1/1339 ; G09G3/34 ; G09G3/36 ; G02F1/1345

Abstract:
An object is to provide a semiconductor device having a structure in which parasitic capacitance between wirings can be efficiently reduced. In a bottom gate thin film transistor using an oxide semiconductor layer, an oxide insulating layer used as a channel protection layer is formed above and in contact with part of the oxide semiconductor layer overlapping with a gate electrode layer, and at the same time an oxide insulating layer covering a peripheral portion (including a side surface) of the stacked oxide semiconductor layer is formed. Further, a source electrode layer and a drain electrode layer are formed in a manner such that they do not overlap with the channel protection layer. Thus, a structure in which an insulating layer over the source electrode layer and the drain electrode layer is in contact with the oxide semiconductor layer is provided.
Public/Granted literature
- US10680111B2 Oxide semiconductor device Public/Granted day:2020-06-09
Information query
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