- 专利标题： Method for Parameter Determination and Apparatus Thereof
-
申请号： US16042302申请日： 2018-07-23
-
公开(公告)号： US20190033725A1公开(公告)日： 2019-01-31
- 发明人: Nitesh PANDEY , Maxim PISARENCO , Alessandro POLO
- 申请人： ASML Netherlands B.V.
- 申请人地址： NL Veldhoven
- 专利权人： ASML Netherlands B.V.
- 当前专利权人： ASML Netherlands B.V.
- 当前专利权人地址： NL Veldhoven
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G01N21/956 ; G01N29/06
摘要：
A method and apparatus to measure overlay from images of metrology targets, images obtained using acoustic waves, for example images obtained using an acoustic microscope. The images of two targets are obtained, one image using acoustic waves and one image using optical waves, the edges of the images are determined and overlay between the two targets is obtained as the difference between the edges of the two images.
公开/授权文献
- US10444638B2 Method for parameter determination and apparatus thereof 公开/授权日：2019-10-15
信息查询
IPC分类:
