发明申请
- 专利标题: GAS LASER APPARATUS
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申请号: US16178351申请日: 2018-11-01
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公开(公告)号: US20190081449A1公开(公告)日: 2019-03-14
- 发明人: Natsushi SUZUKI , Osamu WAKABAYASHI , Hiroaki TSUSHIMA , Masanori YASHIRO
- 申请人: Gigaphoton Inc.
- 申请人地址: JP Tochigi
- 专利权人: Gigaphoton Inc.
- 当前专利权人: Gigaphoton Inc.
- 当前专利权人地址: JP Tochigi
- 优先权: JPPCT/JP2013/081651 20131125
- 主分类号: H01S3/036
- IPC分类号: H01S3/036 ; B01D53/04 ; H01S3/104 ; H01S3/225 ; B01D53/34 ; B01D53/82 ; B01D53/86 ; B01D53/68
摘要:
A gas laser apparatus may include: a laser chamber connected through a first control valve to a first laser gas supply source that supplies a first laser gas containing a halogen gas and connected through a second control valve to a second laser gas supply source that supplies a second laser gas having a lower halogen gas concentration than the first laser gas; a purification column that removes at least a part of the halogen gas and a halogen compound from at least a part of a gas exhausted from the laser chamber; a booster pump, connected through a third control valve to the laser chamber, which raises a pressure of a gas having passed through the purification column to a gas pressure that is higher than an operating gas pressure of the laser chamber; and a controller that calculates, on a basis of a first amount of a gas supplied from the booster pump through the third control valve to the laser chamber, a second amount of the first laser gas that is to be supplied to the laser chamber and controls the first control valve on a basis of a result of the calculation of the second amount.
公开/授权文献
- US10971883B2 Gas laser apparatus 公开/授权日:2021-04-06
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