- 专利标题: SEALING ARTICLE COMPRISING METAL COATING, METHOD OF MAKING AND METHOD OF USING THE SAME
-
申请号: US15801497申请日: 2017-11-02
-
公开(公告)号: US20190093220A1公开(公告)日: 2019-03-28
- 发明人: Peng-Cheng Hong , Jun-Liang Pu , W.L. Hsu , Chung-Hao Kao , Chia-Chun Hung , Cheng-Yi Wu , Chin-Szu Lee
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 主分类号: C23C16/44
- IPC分类号: C23C16/44 ; C23C14/02 ; C23C18/18 ; B29D99/00 ; C23C14/20 ; C23C14/34 ; C25D5/56 ; C25D7/04 ; H01J37/32
摘要:
A sealing article includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.
公开/授权文献
信息查询
IPC分类: