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公开(公告)号：US11920238B2
公开(公告)日：2024-03-05
申请号：US17871810
申请日：2022-07-22
发明人： Peng-Cheng Hong , Jun-Liang Pu , W. L. Hsu , Chung-Hao Kao , Chia-Chun Hung , Cheng-Yi Wu , Chin-Szu Lee
IPC分类号： B29D99/00 , C23C14/02 , C23C14/20 , C23C14/34 , C23C16/44 , C23C18/18 , C25D7/04 , H01J37/32 , B29K19/00 , C23C18/20 , C23C18/24 , C23C18/28 , C23C18/30 , C25D5/56
CPC分类号： C23C16/4409 , B29D99/0053 , C23C14/021 , C23C14/205 , C23C14/34 , C23C18/1875 , C25D7/04 , H01J37/32513 , B29K2019/00 , C23C18/2086 , C23C18/24 , C23C18/285 , C23C18/30 , C25D5/56
摘要： A method of making a sealing article that includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.
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2.发明申请公开(公告)号：US20190093220A1
公开(公告)日：2019-03-28
申请号：US15801497
申请日：2017-11-02
发明人： Peng-Cheng Hong , Jun-Liang Pu , W.L. Hsu , Chung-Hao Kao , Chia-Chun Hung , Cheng-Yi Wu , Chin-Szu Lee
IPC分类号： C23C16/44 , C23C14/02 , C23C18/18 , B29D99/00 , C23C14/20 , C23C14/34 , C25D5/56 , C25D7/04 , H01J37/32
摘要： A sealing article includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.
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3.发明公开公开(公告)号：US20240084447A1
公开(公告)日：2024-03-14
申请号：US18513448
申请日：2023-11-17
发明人： Peng-Cheng Hong , Jun-Liang Pu , W.L. Hsu , Chung-Hao Kao , Chia-Chun Hung , Cheng-Yi Wu , Chin-Szu Lee
IPC分类号： C23C16/44 , B29D99/00 , C23C14/02 , C23C14/20 , C23C14/34 , C23C18/18 , C25D7/04 , H01J37/32
CPC分类号： C23C16/4409 , B29D99/0053 , C23C14/021 , C23C14/205 , C23C14/34 , C23C18/1875 , C25D7/04 , H01J37/32513 , B29K2019/00
摘要： A sealing article includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.
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公开(公告)号：US11851754B2
公开(公告)日：2023-12-26
申请号：US15801497
申请日：2017-11-02
发明人： Peng-Cheng Hong , Jun-Liang Pu , W. L. Hsu , Chung-Hao Kao , Chia-Chun Hung , Cheng-Yi Wu , Chin-Szu Lee
IPC分类号： C23C16/44 , C23C14/02 , C23C18/18 , B29D99/00 , C23C14/34 , C25D7/04 , H01J37/32 , C23C14/20 , B29K19/00 , C25D5/56 , C23C18/28 , C23C18/24 , C23C8/30 , C23C18/20 , C23C18/30
CPC分类号： C23C16/4409 , B29D99/0053 , C23C14/021 , C23C14/205 , C23C14/34 , C23C18/1875 , C25D7/04 , H01J37/32513 , B29K2019/00 , C23C18/2086 , C23C18/24 , C23C18/285 , C23C18/30 , C25D5/56
摘要： A sealing article includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.
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公开(公告)号：US20220356571A1
公开(公告)日：2022-11-10
申请号：US17871810
申请日：2022-07-22
发明人： Peng-Cheng HONG , Jun-Liang Pu , W.L. Hsu , Chung-Hao Kao , Chia-Chun Hung , Cheng-Yi Wu , Chin-Szu Lee
IPC分类号： C23C16/44 , C23C14/02 , C23C18/18 , B29D99/00 , C23C14/34 , C25D7/04 , H01J37/32 , C23C14/20
摘要： A method of making a sealing article that includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.
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