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公开(公告)号：US11920238B2
公开(公告)日：2024-03-05
申请号：US17871810
申请日：2022-07-22
发明人： Peng-Cheng Hong , Jun-Liang Pu , W. L. Hsu , Chung-Hao Kao , Chia-Chun Hung , Cheng-Yi Wu , Chin-Szu Lee
IPC分类号： B29D99/00 , C23C14/02 , C23C14/20 , C23C14/34 , C23C16/44 , C23C18/18 , C25D7/04 , H01J37/32 , B29K19/00 , C23C18/20 , C23C18/24 , C23C18/28 , C23C18/30 , C25D5/56
CPC分类号： C23C16/4409 , B29D99/0053 , C23C14/021 , C23C14/205 , C23C14/34 , C23C18/1875 , C25D7/04 , H01J37/32513 , B29K2019/00 , C23C18/2086 , C23C18/24 , C23C18/285 , C23C18/30 , C25D5/56
摘要： A method of making a sealing article that includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.
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公开(公告)号：US11851754B2
公开(公告)日：2023-12-26
申请号：US15801497
申请日：2017-11-02
发明人： Peng-Cheng Hong , Jun-Liang Pu , W. L. Hsu , Chung-Hao Kao , Chia-Chun Hung , Cheng-Yi Wu , Chin-Szu Lee
IPC分类号： C23C16/44 , C23C14/02 , C23C18/18 , B29D99/00 , C23C14/34 , C25D7/04 , H01J37/32 , C23C14/20 , B29K19/00 , C25D5/56 , C23C18/28 , C23C18/24 , C23C8/30 , C23C18/20 , C23C18/30
CPC分类号： C23C16/4409 , B29D99/0053 , C23C14/021 , C23C14/205 , C23C14/34 , C23C18/1875 , C25D7/04 , H01J37/32513 , B29K2019/00 , C23C18/2086 , C23C18/24 , C23C18/285 , C23C18/30 , C25D5/56
摘要： A sealing article includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.
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3.发明申请公开(公告)号：US20190093220A1
公开(公告)日：2019-03-28
申请号：US15801497
申请日：2017-11-02
发明人： Peng-Cheng Hong , Jun-Liang Pu , W.L. Hsu , Chung-Hao Kao , Chia-Chun Hung , Cheng-Yi Wu , Chin-Szu Lee
IPC分类号： C23C16/44 , C23C14/02 , C23C18/18 , B29D99/00 , C23C14/20 , C23C14/34 , C25D5/56 , C25D7/04 , H01J37/32
摘要： A sealing article includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.
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公开(公告)号：US10157759B2
公开(公告)日：2018-12-18
申请号：US15803680
申请日：2017-11-03
发明人： Hsueh-Kuang Ni , Chi-Jen Chen , Peng-Cheng Hong
摘要： A UV curing apparatus includes a processing chamber, a UV light source disposed above the processing chamber, a window disposed between the processing chamber and the UV light source for allowing a UV light from the UV light source passing through and entering the processing chamber, a sealing ring disposed between the processing chamber and the window for sealing the processing chamber, and a light shading kit disposed between the UV light source and the sealing ring for preventing the sealing ring from being exposed of the UV light. Therefore the sealing ring is not exposed of UV light directly, and the bonding of the rubber sealing ring would not be destroyed.
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公开(公告)号：US09818628B2
公开(公告)日：2017-11-14
申请号：US15256716
申请日：2016-09-05
发明人： Hsueh-Kuang Ni , Chi-Jen Chen , Peng-Cheng Hong
CPC分类号： H01L21/67115 , B05D1/60 , B05D3/067 , C23C16/4409 , C23C16/56 , H01L21/67126
摘要： A UV curing apparatus includes a processing chamber, a UV light source disposed above the processing chamber, a window disposed between the processing chamber and the UV light source for allowing a UV light from the UV light source passing through and entering the processing chamber, a sealing ring disposed between the processing chamber and the window for sealing the processing chamber, and a light shading kit disposed between the UV light source and the sealing ring for preventing the sealing ring from being exposed of the UV light. Therefore the sealing ring is not exposed of UV light directly, and the bonding of the rubber sealing ring would not be destroyed.
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6.发明公开公开(公告)号：US20240084447A1
公开(公告)日：2024-03-14
申请号：US18513448
申请日：2023-11-17
发明人： Peng-Cheng Hong , Jun-Liang Pu , W.L. Hsu , Chung-Hao Kao , Chia-Chun Hung , Cheng-Yi Wu , Chin-Szu Lee
IPC分类号： C23C16/44 , B29D99/00 , C23C14/02 , C23C14/20 , C23C14/34 , C23C18/18 , C25D7/04 , H01J37/32
CPC分类号： C23C16/4409 , B29D99/0053 , C23C14/021 , C23C14/205 , C23C14/34 , C23C18/1875 , C25D7/04 , H01J37/32513 , B29K2019/00
摘要： A sealing article includes a body and a coating layer disposed on at least one surface of the body. The body comprises a polymeric elastomer such as perfluoroelastomer or fluoroelastomer. The coating layer comprises at least one metal. The sealing article may be a seal, a gasket, an O-ring, a T-ring or any other suitable product. The sealing article is resistant to ultra-violet (UV) light and plasma, and may be used for sealing a semiconductor processing chamber.
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公开(公告)号：US09433973B1
公开(公告)日：2016-09-06
申请号：US14739893
申请日：2015-06-15
发明人： Hsueh-Kuang Ni , Chi-Jen Chen , Peng-Cheng Hong
CPC分类号： H01L21/67115 , B05D1/60 , B05D3/067 , C23C16/4409 , C23C16/56 , H01L21/67126
摘要： A UV curing apparatus includes a processing chamber, a UV light source disposed above the processing chamber, a window disposed between the processing chamber and the UV light source for allowing a UV light from the UV light source passing through and entering the processing chamber, a sealing ring disposed between the processing chamber and the window for sealing the processing chamber, and a light shading kit disposed between the UV light source and the sealing ring for preventing the sealing ring from being exposed of the UV light. Therefore the sealing ring is not exposed of UV light directly, and the bonding of the rubber sealing ring would not be destroyed.
摘要翻译： UV固化装置包括处理室，设置在处理室上方的UV光源，设置在处理室和UV光源之间的窗口，用于允许来自UV光源的UV光通过并进入处理室， 设置在处理室和用于密封处理室的窗口之间的密封环，以及设置在UV光源和密封环之间的遮光套件，用于防止密封环暴露于UV光。 因此密封环不会直接暴露在紫外线之下，橡胶密封环的粘接不会被破坏。
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