发明申请
- 专利标题: MEMS DEVICES AND PROCESSES
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申请号: US16140585申请日: 2018-09-25
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公开(公告)号: US20190100429A1公开(公告)日: 2019-04-04
- 发明人: Tom HANLEY , Colin Robert JENKINS , Euan James BOYD
- 申请人: Cirrus Logic International Semiconductor Ltd.
- 申请人地址: GB Edinburgh
- 专利权人: Cirrus Logic International Semiconductor Ltd.
- 当前专利权人: Cirrus Logic International Semiconductor Ltd.
- 当前专利权人地址: GB Edinburgh
- 优先权: GB1717385.7 20171023
- 主分类号: B81B7/02
- IPC分类号: B81B7/02 ; H04R19/04 ; B81C1/00
摘要:
A MEMS transducer and method of forming a MEMS transducer. The MEMS transducer comprises a flexible membrane and a backplate, a membrane electrode being located on a polygon shaped first surface of the flexible membrane, and a backplate electrode being located on a first surface of the backplate facing the membrane electrode. At least one of the membrane electrode and the backplate electrode has an outline shape configured to correspond to a contour of a contour map, the contour map representing relative amounts of displacement of portions of the flexible membrane from an equilibrium position in response to pressure differences generated by incident sound waves.
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