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公开(公告)号：US20180170749A1
公开(公告)日：2018-06-21
申请号：US15847080
申请日：2017-12-19
Inventor： Euan James BOYD
CPC classification number: B81C99/004 , B81B7/0006 , B81B2201/0257 , B81B2203/0127 , B81B2203/0163 , B81B2203/04 , B81B2207/03 , B81B2207/07 , G01D5/24 , G01R31/2884 , H04R19/005 , H04R29/004 , H04R2201/003
Abstract: A MEMS transducer, for instance a MEMS capacitive transducer, comprising: a flexible membrane, the flexible membrane comprising a conductive track; and a continuity testing circuit electrically connected to the conductive track. The conductive track may be electrically isolated from any further conductive regions of the flexible membrane. The continuity testing circuit is configured to test the continuity of the conductive track.
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公开(公告)号：US20180148315A1
公开(公告)日：2018-05-31
申请号：US15810592
申请日：2017-11-13
Inventor： Tom HANLEY , Timothy John BROSNIHAN , Euan James BOYD
CPC classification number: B81B3/001 , B81B2201/0257 , B81B2203/033 , B81B2203/0376 , B81B2207/012 , B81C1/00984 , B81C2201/115 , H04R9/08 , H04R19/005 , H04R19/04 , H04R31/006 , H04R2201/003
Abstract: The application describes a MEMS transducer comprising a substrate having a cavity. The transducer exhibits a membrane layer supported relative to the substrate to define a flexible membrane. An upper surface of the substrate comprises an overlap region between the edge of the cavity and a perimeter of the flexible membrane where the membrane overlies the upper surface of the substrate. At least one portion of the overlap region of the upper surface of the substrate is provided with a plurality of recesses. The recesses are defined so as to extend from the edge of the cavity towards the perimeter of the flexible membrane.
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Patent Agency Ranking
公开(公告)号：US20190100429A1
公开(公告)日：2019-04-04
申请号：US16140585
申请日：2018-09-25
Inventor： Tom HANLEY , Colin Robert JENKINS , Euan James BOYD
Abstract: A MEMS transducer and method of forming a MEMS transducer. The MEMS transducer comprises a flexible membrane and a backplate, a membrane electrode being located on a polygon shaped first surface of the flexible membrane, and a backplate electrode being located on a first surface of the backplate facing the membrane electrode. At least one of the membrane electrode and the backplate electrode has an outline shape configured to correspond to a contour of a contour map, the contour map representing relative amounts of displacement of portions of the flexible membrane from an equilibrium position in response to pressure differences generated by incident sound waves.
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公开(公告)号：US20180002168A1
公开(公告)日：2018-01-04
申请号：US15543492
申请日：2016-01-25
Inventor： Scott Lyall CARGILL , Colin Robert JENKINS , Euan James BOYD , Richard Ian LAMING
CPC classification number: B81C1/00666 , B81B3/0021 , B81B3/0072 , B81B2201/0257 , B81B2203/0127 , B81C1/00182 , H01L2224/16225 , H01L2224/48091 , H01L2224/48227 , H01L2924/15151 , H04R19/005 , H04R19/04 , H01L2924/00014
Abstract: The application describes MEMS transducer having a flexible membrane and which seeks to alleviate and/or redistribute stresses within the membrane layer. A membrane having a first/active region and a second/inactive region is described.
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公开(公告)号：US20180035228A1
公开(公告)日：2018-02-01
申请号：US15660431
申请日：2017-07-26
Inventor： Euan James BOYD
CPC classification number: H04R31/006 , B81B3/0021 , B81B3/0072 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , H04R7/18 , H04R19/005 , H04R19/02 , H04R19/04 , H04R2201/003 , H04R2499/11
Abstract: The application describes MEMS transducers comprising a flexible membrane layer supported in a fixed relation relative to a substrate along at least one supporting edge, wherein a plurality of slits are provided through the membrane layer. The slits define a plurality of beams. Each beam defines a path between first and second endpoints of the beam, the path comprising at least one change in direction. Also described are transducers wherein the membrane layer is supported in a fixed relation relative to the substrate along a plurality of supporting edges which define a membrane region that is substantially bounded by the supporting edges.
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公开(公告)号：US20180007474A1
公开(公告)日：2018-01-04
申请号：US15636121
申请日：2017-06-28
Inventor： Scott Lyall CARGILL , Colin Robert JENKINS , Euan James BOYD
CPC classification number: H04R19/04 , B81B3/0072 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81B2203/0315 , B81C1/00666 , H04R7/04 , H04R7/18 , H04R17/02 , H04R19/005 , H04R2201/003
Abstract: A MEMS transducer structure comprises a substrate comprising a cavity. A membrane layer is supported relative to the substrate to provide a flexible membrane. A peripheral edge of the cavity defines at least one perimeter region that is convex with reference to the center of the cavity. The peripheral edge of the cavity may further define at least one perimeter region that is concave with reference to the center of the cavity.
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公开(公告)号：US20180002159A1
公开(公告)日：2018-01-04
申请号：US15543467
申请日：2016-01-25
Inventor： Scott Lyall CARGILL , Colin Robert JENKINS , Euan James BOYD , Richard Ian LAMING
CPC classification number: B81C1/00666 , B81B3/0021 , B81B3/0072 , B81B2201/0257 , B81B2203/0127 , B81C1/00182 , H01L2224/16225 , H01L2224/48091 , H01L2224/48227 , H01L2924/15151 , H04R19/005 , H04R19/04 , H01L2924/00014
Abstract: The application describes MEMS transducer having a flexible membrane and which seeks to alleviate and/or redistribute stresses within the membrane layer. A membrane having a first/active region and a second/inactive region is described.
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