公开(公告)号：US20180148315A1

公开(公告)日：2018-05-31

申请号：US15810592

申请日：2017-11-13

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： Tom HANLEY ,  Timothy John BROSNIHAN ,  Euan James BOYD

IPC: B81B3/00 ,  B81C1/00 ,  H04R9/08

CPC classification number: B81B3/001 ,  B81B2201/0257 ,  B81B2203/033 ,  B81B2203/0376 ,  B81B2207/012 ,  B81C1/00984 ,  B81C2201/115 ,  H04R9/08 ,  H04R19/005 ,  H04R19/04 ,  H04R31/006 ,  H04R2201/003

Abstract: The application describes a MEMS transducer comprising a substrate having a cavity. The transducer exhibits a membrane layer supported relative to the substrate to define a flexible membrane. An upper surface of the substrate comprises an overlap region between the edge of the cavity and a perimeter of the flexible membrane where the membrane overlies the upper surface of the substrate. At least one portion of the overlap region of the upper surface of the substrate is provided with a plurality of recesses. The recesses are defined so as to extend from the edge of the cavity towards the perimeter of the flexible membrane.

公开(公告)号：US20190100429A1

公开(公告)日：2019-04-04

申请号：US16140585

申请日：2018-09-25

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： Tom HANLEY ,  Colin Robert JENKINS ,  Euan James BOYD

IPC: B81B7/02 ,  H04R19/04 ,  B81C1/00

Abstract: A MEMS transducer and method of forming a MEMS transducer. The MEMS transducer comprises a flexible membrane and a backplate, a membrane electrode being located on a polygon shaped first surface of the flexible membrane, and a backplate electrode being located on a first surface of the backplate facing the membrane electrode. At least one of the membrane electrode and the backplate electrode has an outline shape configured to correspond to a contour of a contour map, the contour map representing relative amounts of displacement of portions of the flexible membrane from an equilibrium position in response to pressure differences generated by incident sound waves.

公开(公告)号：US20190062146A1

公开(公告)日：2019-02-28

申请号：US16106542

申请日：2018-08-21

Applicant: Cirrus Logic International Semiconductor Ltd.

Inventor： Tom HANLEY ,  Colin Robert JENKINS

IPC: B81B3/00 ,  B81B7/00

Abstract: The application describes a MEMS transducer comprising a membrane which comprises an active membrane region and a substrate having a cavity. An upper surface of the substrate comprises an overlap region which underlies the membrane. A first portion of the overlap region is provided with at least one recess. The at least one recess does not intersect an edge of the cavity.