- 专利标题: ON-CHIP BIOSENSORS WITH NANOMETER SCALE GLASS-LIKE CARBON ELECTRODES AND IMPROVED ADHESIVE COUPLING
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申请号: US15720986申请日: 2017-09-29
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公开(公告)号: US20190101503A1公开(公告)日: 2019-04-04
- 发明人: Hariklia Deligianni , Bruce B. Doris , Damon B. Farmer , Steven J. Holmes , Qinghuang Lin , Nathan P. Marchack , Deborah A. Neumayer , Roy R. Yu
- 申请人: International Business Machines Corporation
- 主分类号: G01N27/327
- IPC分类号: G01N27/327 ; H01L23/528 ; H01L23/48 ; H01L21/768 ; G01N27/48 ; G01N33/94
摘要:
Embodiments of the invention are directed to a biosensing integrated circuit (IC). A non-limiting example of the biosensing IC includes a plurality of semiconductor substrate layers. A sensor element is formed over a first one of the plurality of semiconductor substrate layers, wherein the sensor element is configured to, based at hleast in part on the sensor element interacting with a predetermined material, generate data representing a measureable electrical parameter. An adhesion enhancement region is configured to physically couple the sensor element to the first one of the plurality of semiconductor substrate layers. In some embodiments of the invention, the biosensing IC further includes an electrically conductive interconnect network configured to communicatively couple the data representing the measureable electrical parameter to computer elements.
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