- 专利标题： Hydrogencarbonate Water and Cleaning Method Using Same
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申请号： US16325757申请日： 2017-08-17
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公开(公告)号： US20190177668A1公开(公告)日： 2019-06-13
- 发明人: Toshihisa Gohda , Jae Yong Lee
- 申请人： Gohda Water Treatment Technology Co., Inc. , MAG Technology Co., Ltd.
- 优先权： KR10-2016-0105253 20160819
- 国际申请： PCT/JP2017/029515 WO 20170817
- 主分类号： C11D7/08
- IPC分类号： C11D7/08 ; B01F3/04 ; C02F1/461 ; B08B3/02 ; B08B3/10 ; H01L21/67 ; H01L21/687 ; H01L21/02 ; C11D11/00
摘要：
The present invention relates to hydrogencarbonate water and a cleaning method using the hydrogencarbonate water. Provided are hydrogencarbonate water obtained by dissolving carbon dioxide in hydrogen water having a dissolved hydrogen concentration of 0.1 ppm to 2.0 ppm; and a cleaning method comprising cleaning a substrate by immersing the substrate in the hydrogencarbonate water, or spraying the hydrogencarbonate water to the substrate.
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