- 专利标题: TEMPERATURE MEASUREMENT IN MULTI-ZONE HEATER
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申请号: US16216526申请日: 2018-12-11
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公开(公告)号: US20190206706A1公开(公告)日: 2019-07-04
- 发明人: Dale R. Du Bois , Bozhi Yang , Jianhua Zhou , Sanjeev Baluja , Amit Kumar Bansal , Juan Carlos Rocha-Alvarez
- 申请人: Applied Materials, Inc.
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; H01L21/683
摘要:
Embodiments of the present disclosure generally provide apparatus and methods for monitoring one or more process parameters, such as temperature of substrate support, at various locations. One embodiment of the present disclosure provides a sensor column for measuring one or more parameters in a processing chamber. The sensor column includes a tip for contacting a chamber component being measured, a protective tube having an inner volume extending from a first end and second end, wherein the tip is attached to the first end of the protective tube and seals the protective tube at the first end, and a sensor disposed near the tip. The inner volume of the protective tube houses connectors of the sensor, and the tip is positioned in the processing chamber through an opening of the processing chamber during operation.
公开/授权文献
- US10720349B2 Temperature measurement in multi-zone heater 公开/授权日:2020-07-21
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