- 专利标题: OPTICAL SCANNING DEVICE AND METHOD FOR PRODUCING OPTICAL SCANNING DEVICE
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申请号: US16247926申请日: 2019-01-15
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公开(公告)号: US20190235232A1公开(公告)日: 2019-08-01
- 发明人: Hisamichi SEKINE , Maiko NAGAWATARI , Seiya SATO
- 申请人: Hisamichi SEKINE , Maiko NAGAWATARI , Seiya SATO
- 申请人地址: JP Tokyo
- 专利权人: MITSUMI ELECTRIC CO., LTD.
- 当前专利权人: MITSUMI ELECTRIC CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2018-012926 20180129
- 主分类号: G02B26/10
- IPC分类号: G02B26/10 ; G02B26/08 ; H01L41/083 ; H01L41/113 ; H01L41/09 ; H01L41/332
摘要:
An optical scanning device includes: a mirror that has an optical reflection surface; a mirror support unit configured to support the mirror; a pair of drive beams arranged on both sides of the mirror support unit and connected such that the mirror support unit is swingable; a drive source provided on the drive beams and configured to swing the mirror support unit, the drive source including a stack structure of a plurality of piezoelectric thin films; and a piezoelectric sensor formed on a connection beam connected to the drive source or the drive beams, a number of piezoelectric thin films included in the piezoelectric sensor being less than a number of the piezoelectric thin films included in the drive source.