公开(公告)号：US20190235232A1

公开(公告)日：2019-08-01

申请号：US16247926

申请日：2019-01-15

申请人： Hisamichi SEKINE ,  Maiko NAGAWATARI ,  Seiya SATO

发明人： Hisamichi SEKINE ,  Maiko NAGAWATARI ,  Seiya SATO

IPC分类号： G02B26/10 ,  G02B26/08 ,  H01L41/083 ,  H01L41/113 ,  H01L41/09 ,  H01L41/332

CPC分类号： G02B26/101 ,  G02B26/0816 ,  H01L41/083 ,  H01L41/0933 ,  H01L41/1132 ,  H01L41/332

摘要： An optical scanning device includes: a mirror that has an optical reflection surface; a mirror support unit configured to support the mirror; a pair of drive beams arranged on both sides of the mirror support unit and connected such that the mirror support unit is swingable; a drive source provided on the drive beams and configured to swing the mirror support unit, the drive source including a stack structure of a plurality of piezoelectric thin films; and a piezoelectric sensor formed on a connection beam connected to the drive source or the drive beams, a number of piezoelectric thin films included in the piezoelectric sensor being less than a number of the piezoelectric thin films included in the drive source.