Invention Application
- Patent Title: SEMICONDUCTOR DEVICE MANUFACTURING METHOD
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Application No.: US16514003Application Date: 2019-07-17
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Publication No.: US20190341420A1Publication Date: 2019-11-07
- Inventor: Noburo HOSOKAWA , Nao INOUE , Katsumi SHIBAYAMA
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi
- Priority: JP2015-070697 20150331
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L23/00 ; H01L31/0216 ; H01L23/48 ; H01L21/768 ; H01L31/103 ; H01L21/3205 ; H01L23/522 ; H01L23/532 ; H01L31/02 ; H01L31/107 ; H01L31/0224

Abstract:
A method of manufacturing a semiconductor device includes a first process in which a first wiring 3 is provided on a first surface 2a of a semiconductor substrate 2; a second process in which a light transmitting substrate 5 is attached to the first surface 2a; a third process in which the semiconductor substrate 2 is thinned so that the thickness of the semiconductor substrate 2 is smaller than the thickness of the light transmitting substrate 5; a fourth process in which a through hole 7 is formed in the semiconductor substrate 2; a fifth process in which a dip coating method is performed using a first resin material and thus a resin insulating layer 10 is provided; a sixth process in which a contact hole 16 is formed in the resin insulating layer 10; and a seventh process in which a second wiring 8 is provided on a surface 10b of the resin insulating layer 10, and the first wiring 3 and the second wiring 8 are electrically connected via a contact hole 16.
Information query
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