Invention Application
- Patent Title: HOLDING APPARATUS
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Application No.: US16481676Application Date: 2018-01-31
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Publication No.: US20200006095A1Publication Date: 2020-01-02
- Inventor: Kaname MIWA
- Applicant: NGK SPARK PLUG CO., LTD.
- Applicant Address: JP Nagoya-shi, Aichi
- Assignee: NGK SPARK PLUG CO., LTD.
- Current Assignee: NGK SPARK PLUG CO., LTD.
- Current Assignee Address: JP Nagoya-shi, Aichi
- Priority: JP2017-016751 20170201
- International Application: PCT/JP2018/003251 WO 20180131
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H05B3/10 ; H01L21/683 ; H05B1/02 ; H05B3/06

Abstract:
A holding apparatus including a holding substrate having a first main face on one side in a thickness direction thereof, and a heat generation section which is disposed in the holding substrate and generates heat when energized. The heat generation section includes a plurality of first heating elements arrayed in a planar direction orthogonal to the thickness direction of the holding substrate, and a second heating element disposed on a side toward the first main face in the thickness direction with respect to the plurality of first heating elements. Any one of the plurality of first heating elements is electrically connected to the second heating element in series through a first via extending in the thickness direction within the holding substrate.
Public/Granted literature
- US11631597B2 Holding apparatus Public/Granted day:2023-04-18
Information query
IPC分类: