公开(公告)号：US20200006095A1

公开(公告)日：2020-01-02

申请号：US16481676

申请日：2018-01-31

Applicant: NGK SPARK PLUG CO., LTD.

Inventor： Kaname MIWA

IPC: H01L21/67 ,  H05B3/10 ,  H01L21/683 ,  H05B1/02 ,  H05B3/06

Abstract: A holding apparatus including a holding substrate having a first main face on one side in a thickness direction thereof, and a heat generation section which is disposed in the holding substrate and generates heat when energized. The heat generation section includes a plurality of first heating elements arrayed in a planar direction orthogonal to the thickness direction of the holding substrate, and a second heating element disposed on a side toward the first main face in the thickness direction with respect to the plurality of first heating elements. Any one of the plurality of first heating elements is electrically connected to the second heating element in series through a first via extending in the thickness direction within the holding substrate.

公开(公告)号：US20210007183A1

公开(公告)日：2021-01-07

申请号：US16969703

申请日：2019-02-12

Applicant: NGK SPARK PLUG CO., LTD.

Inventor： Kaname MIWA

IPC: H05B3/03 ,  H01L21/31 ,  H02N13/00 ,  B23Q3/15 ,  H05B3/74

Abstract: A holding device including a plate-shaped member, a base member, a plurality of heater electrodes disposed in the plate-shaped member, a plurality of electricity supply terminals, a bonding portion, and insulating members. The holding device holds an object on the surface of the plate-shaped member. The plurality of electricity supply terminals disposed in the holding device include N individual electricity supply terminals (N is an integer of 2 or more) electrically connected to respective N heater electrodes of the plurality of heater electrodes, and a common electricity supply terminal electrically connected to all the N heater electrodes. The N individual electricity supply terminals are received in one terminal hole in which the common electricity supply terminal is not received and are insulated from one another by an insulating member. The common electricity supply terminal is received in another terminal hole in which the individual electricity supply terminals are not received.

公开(公告)号：US20170133258A1

公开(公告)日：2017-05-11

申请号：US15318052

申请日：2015-06-17

Applicant: NGK SPARK PLUG CO., LTD.

Inventor： Kaname MIWA ,  Shota SAITO

IPC: H01L21/683 ,  H01L21/67

CPC classification number: H01L21/6833 ,  H01L21/67103 ,  H01L21/6831 ,  H01L21/68757 ,  H01L21/68785

Abstract: An electrostatic chuck includes an anisotropic heat conductor which is disposed between an attraction substrate and a first heater member, and has an upper surface and a lower surface, and a coefficient of thermal conductivity which varies depending on directions. The anisotropic heat conductor is disposed so that the coefficient of thermal conductivity in a plane direction is larger than the coefficient of thermal conductivity in a thickness direction. Further, the electrostatic chuck includes metal layers which are joined to the anisotropic heat conductor so as to cover the upper surface and the lower surface of the anisotropic heat conductor, and an adhesive layer which is provided on a surface of each metal layer, and joins the metal layer to the attraction substrate or the heater member. Moreover, at least one of the metal layers is a fused metal layer formed by solidifying a melted metal.

公开(公告)号：US20210090930A1

公开(公告)日：2021-03-25

申请号：US16603631

申请日：2018-04-06

Applicant: NGK SPARK PLUG CO., LTD.

Inventor： Kaname MIWA

IPC: H01L21/683 ,  H01L21/67 ,  H05B1/02

Abstract: A holding device includes: a plate-shaped member having a first surface approximately orthogonal to a first direction; heat generating resistors and temperature measuring resistors disposed in respective segments formed by virtually dividing at least part of the plate-shaped member, the segments being arranged in a direction orthogonal to the first direction; and an electricity supply section that forms electricity supply paths for the heat generating resistors and the temperature measuring resistors. The holding device holds an object on the first surface of the plate-shaped member. The position of the temperature measuring resistors in the first direction differs from the position of the heat generating resistors in the first direction. A specific temperature measuring resistor that is at least one of the temperature measuring resistors includes a plurality of resistor elements disposed at different positions in the first direction and connected to one another in series.

公开(公告)号：US20170359859A1

公开(公告)日：2017-12-14

申请号：US15177927

申请日：2016-06-09

Applicant: NGK SPARK PLUG CO., LTD.

Inventor： Akifumi TOSA ,  Yasuhiko INUI ,  Kaname MIWA ,  Yosuke SHINOZAKI

IPC: H05B3/26 ,  H01L21/67 ,  H01L21/683 ,  H05B1/02

Abstract: A multilayer heating body (1) includes a ceramic substrate (3), an electrode (4), heaters (5, 7), terminals (11, 13, 15, 17), and an electricity supply path (19). Through vias which constitute the electricity supply path include at least one combination of through vias α, β, γ, and δ which meets the following conditions (1) and (2). Condition (1): when the ceramic substrate is viewed from the front surface (3a) side toward the back surface (3b) side, the through via δ is located at a position where the through via δ overlaps the through via β, or in the vicinity of the through via β. Condition (2): when the ceramic substrate is viewed from the front surface side toward the back surface side, the through via γ is located at a position between the through via α and the through via δ, or located at a position where the through via γ overlaps the through via α, or in the vicinity of the through via α.