WRAP-AROUND CONTACT SURROUNDING EPITAXIAL REGIONS OF INTEGRATED CIRCUIT STRUCTURES AND METHOD OF FORMING SAME
Abstract:
The present disclosure relates to integrated circuit (IC) structures and their method of manufacture. More particularly, the present disclosure relates to forming a semiconductor device having generally fork-shaped contacts around epitaxial regions to increase surface contact area and improve device performance. The integrated circuit (IC) structure of the present disclosure comprises a plurality of fins disposed on a semiconductor substrate, at least one epitaxial region laterally disposed on selected fins, and a contact material positioned over and surrounding the epitaxial region.
Information query
Patent Agency Ranking
0/0