Invention Application
- Patent Title: WRAP-AROUND CONTACT SURROUNDING EPITAXIAL REGIONS OF INTEGRATED CIRCUIT STRUCTURES AND METHOD OF FORMING SAME
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Application No.: US16162373Application Date: 2018-10-16
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Publication No.: US20200119002A1Publication Date: 2020-04-16
- Inventor: RUILONG XIE , WILLIAM TAYLOR , HUI ZANG
- Applicant: GLOBALFOUNDRIES INC.
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/66 ; H01L29/78 ; H01L21/8234

Abstract:
The present disclosure relates to integrated circuit (IC) structures and their method of manufacture. More particularly, the present disclosure relates to forming a semiconductor device having generally fork-shaped contacts around epitaxial regions to increase surface contact area and improve device performance. The integrated circuit (IC) structure of the present disclosure comprises a plurality of fins disposed on a semiconductor substrate, at least one epitaxial region laterally disposed on selected fins, and a contact material positioned over and surrounding the epitaxial region.
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Information query
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