Invention Application
- Patent Title: SMOOTH SIDEWALL STRUCTURES
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Application No.: US16171477Application Date: 2018-10-26
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Publication No.: US20200135545A1Publication Date: 2020-04-30
- Inventor: Ravi P. SRIVASTAVA , Sipeng GU , Sunil K. SINGH , Xinyuan DOU , Akshey SEHGAL , Zhiguo SUN
- Applicant: GLOBALFOUNDRIES INC.
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L21/02

Abstract:
The present disclosure generally relates to semiconductor structures and, more particularly, to smooth sidewall structures and methods of manufacture. The method includes: forming a plurality of mandrel structures; forming a first spacer material on each of the plurality of mandrel structures; forming a second spacer material over the first spacer material; and removing the first spacer material and the plurality of mandrel structures to form a sidewall structure having a sidewall smoothness greater than the plurality of mandrel structures.
Public/Granted literature
- US10714380B2 Method of forming smooth sidewall structures using spacer materials Public/Granted day:2020-07-14
Information query
IPC分类: