Invention Application
- Patent Title: GETTER TECHNOLOGY FOR MICROMACHINED ULTRASONIC TRANSDUCER CAVITIES
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Application No.: US16680956Application Date: 2019-11-12
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Publication No.: US20200147641A1Publication Date: 2020-05-14
- Inventor: Keith G. Fife , Lingyun Miao , Jianwei Liu , Jonathan M. Rothberg
- Applicant: Butterfly Network, Inc.
- Applicant Address: US CT Guilford
- Assignee: Butterfly Network, Inc.
- Current Assignee: Butterfly Network, Inc.
- Current Assignee Address: US CT Guilford
- Main IPC: B06B1/02
- IPC: B06B1/02 ; B81B7/00 ; B81C1/00 ; A61B8/00
Abstract:
A method of forming an ultrasonic transducer device includes bonding a membrane to seal a transducer cavity with at least a portion of a getter material layer being exposed, the getter material layer comprising a portion of a bilayer stack compatible for use in damascene processing.
Public/Granted literature
- US11638931B2 Getter technology for micromachined ultrasonic transducer cavities Public/Granted day:2023-05-02
Information query
IPC分类:
