Invention Application
- Patent Title: Leveling Sensor, Load Port Including the Same, and Method of Leveling a Load Port
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Application No.: US16740897Application Date: 2020-01-13
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Publication No.: US20200149886A1Publication Date: 2020-05-14
- Inventor: Yi-Lin Wang , Jung-Tang Wu , Chin-Szu Lee , Hua-Sheng Chiu
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Main IPC: G01C9/06
- IPC: G01C9/06 ; H01L21/67 ; G08B21/18 ; G01H1/00 ; H01L21/677

Abstract:
A leveling sensor, a load port including a leveling sensor, and a method of leveling a load port using a load port are disclosed. In an embodiment, a sensor includes an accelerometer configured to detect leveling and vibration of a load port and produce a plurality of data; a plurality of indicator lights configured to display a level measurement and a level direction based on the leveling of the load port; a processor configured to process the data produced by the accelerometer; and a wired connection configured to connect the processor to an external device.
Public/Granted literature
- US11022437B2 Leveling sensor, load port including the same, and method of leveling a load port Public/Granted day:2021-06-01
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