- 专利标题: Methods of Fabricating Integrated Structures
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申请号: US16738499申请日: 2020-01-09
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公开(公告)号: US20200152658A1公开(公告)日: 2020-05-14
- 发明人: John M. Meldrim , Yushi Hu , Rita J. Klein , John D. Hopkins , Hongbin Zhu , Gordon A. Haller , Luan C. Tran
- 申请人: Micron Technology, Inc.
- 主分类号: H01L27/11582
- IPC分类号: H01L27/11582 ; H01L27/11524 ; H01L27/11556 ; H01L27/1157 ; H01L21/28 ; H01L29/49
摘要:
Some embodiments include a memory array which has a stack of alternating first and second levels. Channel material pillars extend through the stack, and vertically-stacked memory cell strings are along the channel material pillars. A common source is under the stack and electrically coupled to the channel material pillars. The common source has conductive protective material over and directly against metal silicide, with the conductive protective material being a composition other than metal silicide. Some embodiments include methods of fabricating integrated structures.
公开/授权文献
- US10943920B2 Methods of fabricating integrated structures 公开/授权日:2021-03-09
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