Invention Application
- Patent Title: OFFSET HEAD-SPINDLE FOR CHEMICAL MECHANICAL POLISHING
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Application No.: US16690062Application Date: 2019-11-20
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Publication No.: US20200156206A1Publication Date: 2020-05-21
- Inventor: Steven M. ZUNIGA , Jay GURUSAMY , Bum Jick KIM , Danielle LOI
- Applicant: Applied Materials, Inc.
- Main IPC: B24B37/30
- IPC: B24B37/30

Abstract:
A polishing system is provided, including a carrier with an offset distance. The offset distance allows a shifted carrier head to cover more surface area of the polishing surface. The offset distance effectively provides an additional rotation of the carrier head about the axis, which allows for a greater area traversed on the polishing surface, improving chemical mechanical polishing uniformity on the substrate.
Public/Granted literature
- US3149997A Low temperature pressure sensitive adhesive tape Public/Granted day:1964-09-22
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