- 专利标题： REGULATION PLATE, ANODE HOLDER, AND SUBSTRATE HOLDER
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申请号： US16630369申请日： 2018-07-06
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公开(公告)号： US20200157702A1公开(公告)日： 2020-05-21
- 发明人: Naoki Shimomura , Mizuki Nagai
- 申请人： EBARA CORPORATION
- 优先权： com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@708ff2a3
- 国际申请： PCT/JP2018/025622 WO 20180706
- 主分类号： C25D17/10
- IPC分类号： C25D17/10 ; C25D17/00 ; C25D17/06 ; C25D17/02 ; C25D21/12 ; H01L21/683 ; H01L21/288
摘要：
To partially or locally control a plating film thickness on a polygonal substrate. There is provided a regulation plate for adjusting a current between an anode and the polygonal substrate. This regulation plate includes a main body that has an edge forming a polygonal opening through which the current passes and an attachable/detachable shielding member to shield at least a part of the polygonal opening.
公开/授权文献
- US11268207B2 Regulation plate, anode holder, and substrate holder 公开/授权日：2022-03-08
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