• Patent Title: VACUUM PUMP, AND MAGNETIC BEARING PORTION AND SHAFT PROVIDED IN VACUUM PUMP
  • Application No.: US16604820
    Application Date: 2018-04-11
  • Publication No.: US20200158117A1
    Publication Date: 2020-05-21
  • Inventor: Yongwei ShiTooru MiwataYoshiyuki Sakaguchi
  • Applicant: Edwards Japan Limited
  • Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@7e1fa7d1
  • International Application: PCT/JP2018/015284 WO 20180411
  • Main IPC: F04D19/04
  • IPC: F04D19/04 F16C32/04
VACUUM PUMP, AND MAGNETIC BEARING PORTION AND SHAFT PROVIDED IN VACUUM PUMP
Abstract:
In a vacuum pump, the lower Ra sensor target, the fourth spacer, and the Ra electromagnetic target are configured in this order, from the inlet port side toward the outlet port side, at the lower side of the shaft of the 5-axis control magnetic bearing Likewise, at the lower side of the stator, the lower Ra sensor and the lower Ra electromagnet are configured in this order, from the inlet port toward the outlet port. In other words, the lower Ra sensor is disposed above the lower Ra electromagnet. According to this configuration, the third spacer fixed above the lower Ra sensor target is shortened. As a result, the height of the 5-axis control magnetic bearing and the length of the stator column enclosing electrical components constituting the 5-axis control magnetic bearing is reduced, thereby reducing the overall height of the vacuum pump.
Information query
Patent Agency Ranking
0/0