Invention Application
- Patent Title: Single Cell Grey Scatterometry Overlay Targets and Their Measurement Using Varying Illumination Parameter(s)
-
Application No.: US16491963Application Date: 2019-08-05
-
Publication No.: US20200159129A1Publication Date: 2020-05-21
- Inventor: Amnon Manassen , Yuri Paskover , Eran Amit
- Applicant: KLA-TENCOR CORPORATION
- International Application: PCT/US2019/045039 WO 20190805
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G01B11/27 ; G01B9/02
Abstract:
Scatterometry overlay (SCOL) measurement methods, systems and targets are provided to enable efficient SCOL metrology with in-die targets. Methods comprise generating a signal matrix by: illuminating a SCOL target at multiple values of at least one illumination parameter, and at multiple spot locations on the target, wherein the illumination is at a NA (numerical aperture)>⅓ yielding a spot diameter
Public/Granted literature
Information query
IPC分类:
