Invention Application
- Patent Title: SYSTEMS AND METHODS FOR AUTOMATED PROCESSING PORTS
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Application No.: US16588182Application Date: 2019-09-30
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Publication No.: US20200161160A1Publication Date: 2020-05-21
- Inventor: Tsung-Sheng KUO , Yi-Fam SHIU , Eason CHEN , Yang-Ann CHU , Jiun-Rong PAI
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/677 ; H01L21/67
Abstract:
In an embodiment, a system includes: a tool port of a semiconductor processing tool; a processing port with an internal processing port location and an external processing port location; a robot configured to move a die vessel between the internal processing port location and the tool port; and an actuator configured to move the die vessel between the internal processing port location and the external processing port location.
Public/Granted literature
- US11705358B2 Systems and methods for automated processing ports Public/Granted day:2023-07-18
Information query
IPC分类:
