Invention Application
- Patent Title: BACKSIDE WAFER ALIGNMENT METHODS
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Application No.: US16505967Application Date: 2019-07-09
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Publication No.: US20200243367A1Publication Date: 2020-07-30
- Inventor: Michael J. SEDDON , Takashi NOMA
- Applicant: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Applicant Address: US AZ Phoenix
- Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Current Assignee Address: US AZ Phoenix
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/78 ; H01L21/768

Abstract:
Implementations of a method for wafer alignment may include: providing a wafer having a first side and a second side and forming a seed layer on a second side of the wafer. The method may include applying a glop to the seed layer at two or more predetermined points and plating a metal layer over the seed layer and around the glop. The method may include removing the glop to expose the seed layer and etching the seed layer to expose a plurality of alignment features on the second side of the wafer.
Public/Granted literature
- US10755956B2 Backside wafer alignment methods Public/Granted day:2020-08-25
Information query
IPC分类: