- 专利标题: CONTACTLESS LATCH AND COUPLING FOR VACUUM WAFER TRANSFER CASSETTE
-
申请号: US16752502申请日: 2020-01-24
-
公开(公告)号: US20200286760A1公开(公告)日: 2020-09-10
- 发明人: Shreyas PATIL SHANTHAVEERASWAMY , Ribhu GAUTAM , Kumaresan NAGARAJAN , Vijay SINGH , Andrew J. CONSTANT , Michael P. KARAZIM , Kim Ramkumar VELLORE
- 申请人: Applied Materials, Inc.
- 主分类号: H01L21/673
- IPC分类号: H01L21/673 ; H01L21/67
摘要:
Embodiments of the present disclosure relate to a substrate transfer device having a contactless latch and contactless coupling providing the ability to lock and unlock the substrate transfer device at atmospheric and vacuum pressure with without particle generation at a base of the substrate transfer device, the contactless latch, and the contactless coupling. The substrate transfer device includes a lid having one or more lid grooves, a base having one or more base grooves, and a rotation member rotatably coupled to the lid. Each flange of one or more flanges of the substrate transfer device is rotatable in aligned lid grooves and base grooves, and each flange of the one or more flanges has an arm with a ferromagnetic material coupled thereto. The base is coupled to the lid when the ferromagnetic material of the arm is aligned and spaced from a magnetic material of a slot of the one or more base grooves.
公开/授权文献
信息查询
IPC分类: