公开(公告)号：US20230374660A1

公开(公告)日：2023-11-23

申请号：US17663695

申请日：2022-05-17

申请人： Applied Materials, Inc.

发明人： Harpreet SINGH ,  Jallepally RAVI ,  Zubin HUANG ,  Manjunatha KOPPA ,  Sandesh YADAMANE ,  Srinivas TOKUR MOHANA ,  Shreyas PATIL SHANTHAVEERASWAMY ,  Kai WU ,  Peiqi WANG ,  Mingrui ZHAO

IPC分类号： C23C16/455 ,  C23C16/06 ,  H01L21/285

CPC分类号： C23C16/45561 ,  C23C16/06 ,  H01L21/28568 ,  C23C16/45591

摘要： A substrate processing system is provided having a processing chamber. The processing chamber includes a lid plate, one or more chamber sidewalls, and a chamber base that collectively define a processing volume. An annular plate is coupled to the lid plate, and an edge manifold is fluidly coupled to the processing chamber through the annular plate and the lid plate. The substrate processing system includes a center manifold that is coupled to the lid plate.

公开(公告)号：US20200286760A1

公开(公告)日：2020-09-10

申请号：US16752502

申请日：2020-01-24

申请人： Applied Materials, Inc.

发明人： Shreyas PATIL SHANTHAVEERASWAMY ,  Ribhu GAUTAM ,  Kumaresan NAGARAJAN ,  Vijay SINGH ,  Andrew J. CONSTANT ,  Michael P. KARAZIM ,  Kim Ramkumar VELLORE

IPC分类号： H01L21/673 ,  H01L21/67

摘要： Embodiments of the present disclosure relate to a substrate transfer device having a contactless latch and contactless coupling providing the ability to lock and unlock the substrate transfer device at atmospheric and vacuum pressure with without particle generation at a base of the substrate transfer device, the contactless latch, and the contactless coupling. The substrate transfer device includes a lid having one or more lid grooves, a base having one or more base grooves, and a rotation member rotatably coupled to the lid. Each flange of one or more flanges of the substrate transfer device is rotatable in aligned lid grooves and base grooves, and each flange of the one or more flanges has an arm with a ferromagnetic material coupled thereto. The base is coupled to the lid when the ferromagnetic material of the arm is aligned and spaced from a magnetic material of a slot of the one or more base grooves.