公开(公告)号：US20240013987A1

公开(公告)日：2024-01-11

申请号：US17861792

申请日：2022-07-11

申请人： Applied Materials, Inc.

发明人： Vijay SINGH ,  Kumaresan NAGARAJAN ,  Adarsh BALAREDDY

IPC分类号： H01H9/02

CPC分类号： H01H9/0271

摘要： In embodiments, systems and apparatus comprise a bracket having a through hole configured to receive a first connector connected to a panel spaced from the bracket, the bracket movable between first and second positions; a switch mountable on the panel, the switch having first and second switch positions; and at least one compression spring extending from the bracket to bias the bracket into the first position spaced away from the switch. When the bracket is in the first position, the switch is in the first switch position, and when the bracket is in the second position, the bracket engages and actuates the switch into the second switch position. The bracket is movable into the second position to engage and actuate the switch by coupling a second connector to the first connector. The switch is configured to trigger a signal indicating that the first connector is connected to the second connector.

公开(公告)号：US20240071729A1

公开(公告)日：2024-02-29

申请号：US17896075

申请日：2022-08-26

申请人： Applied Materials, Inc.

发明人： Kumaresan NAGARAJAN ,  Yue GUO ,  Vijay SINGH ,  Adarsh BALAREDDY

IPC分类号： H01J37/32 ,  H01B5/00

CPC分类号： H01J37/32577 ,  H01B5/00 ,  H01J37/32082 ,  H01R4/4881

摘要： Embodiments of radio frequency (RF) power connection rods are provided herein. In some embodiments, an RF power connection rod includes a first connection rod having a first connection end, a first socket end opposite the first connection end, and a first hollow portion extending from the first connection end to the first socket end; a second connection rod having a second connection end, a second socket end opposite the second connection end, and a second hollow portion extending from the second connection end to the second socket end, wherein the second connection end is adjustably coupled to the first connection end along an axial direction of the second connection rod, and wherein a gas flow path extends from one or more gas inlets of the first connection rod, through the first hollow portion to the second hollow portion, to one or more gas outlets disposed through the second connection rod; a first plug coupled to the first socket end; and a second plug coupled to the second socket end.

公开(公告)号：US20200286760A1

公开(公告)日：2020-09-10

申请号：US16752502

申请日：2020-01-24

申请人： Applied Materials, Inc.

发明人： Shreyas PATIL SHANTHAVEERASWAMY ,  Ribhu GAUTAM ,  Kumaresan NAGARAJAN ,  Vijay SINGH ,  Andrew J. CONSTANT ,  Michael P. KARAZIM ,  Kim Ramkumar VELLORE

IPC分类号： H01L21/673 ,  H01L21/67

摘要： Embodiments of the present disclosure relate to a substrate transfer device having a contactless latch and contactless coupling providing the ability to lock and unlock the substrate transfer device at atmospheric and vacuum pressure with without particle generation at a base of the substrate transfer device, the contactless latch, and the contactless coupling. The substrate transfer device includes a lid having one or more lid grooves, a base having one or more base grooves, and a rotation member rotatably coupled to the lid. Each flange of one or more flanges of the substrate transfer device is rotatable in aligned lid grooves and base grooves, and each flange of the one or more flanges has an arm with a ferromagnetic material coupled thereto. The base is coupled to the lid when the ferromagnetic material of the arm is aligned and spaced from a magnetic material of a slot of the one or more base grooves.