Invention Application
- Patent Title: Method and Device for Monitoring Dicing Tape Tension
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Application No.: US16800192Application Date: 2020-02-25
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Publication No.: US20200286795A1Publication Date: 2020-09-10
- Inventor: Walter Leitgeb , Daniel Brunner , Lukas Ferlan
- Applicant: Infineon Technologies AG
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2413d958
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/67 ; H01L21/683 ; G01L1/24
Abstract:
A method of monitoring a dicing tape tension is described. The method includes acquiring tension data indicative of the dicing tape tension by automated optical inspection of a dicing tape.
Public/Granted literature
- US11251097B2 Method and device for monitoring dicing tape tension Public/Granted day:2022-02-15
Information query
IPC分类:
