Invention Application
- Patent Title: REACTOR FOR COATING PARTICLES IN STATIONARY CHAMBER WITH ROTATING PADDLES AND GAS INJECTION
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Application No.: US16855871Application Date: 2020-04-22
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Publication No.: US20200338521A1Publication Date: 2020-10-29
- Inventor: Jonathan Frankel , Colin C. Neikirk , Pravin K. Narwankar , Quoc Truong , Govindraj Desai , Sekar Krishnasamy
- Applicant: Applied Materials, Inc.
- Main IPC: B01J19/18
- IPC: B01J19/18 ; B01F7/00 ; B01F7/04 ; B01J19/00

Abstract:
A reactor for coating particles includes a stationary vacuum chamber having a lower portion that forms a half-cylinder and an upper portion to hold a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, a motor to rotate a drive shaft of the paddle assembly, a chemical delivery system to deliver a first fluid, and a first gas injection assembly to receive the first fluid from the chemical delivery system and having apertures configured to inject a first reactant or precursor gas into the lower portion of the chamber and such that the first reactant or precursor gas flows substantially tangent to a curved inner surface of the half-cylinder.
Public/Granted literature
- US11674223B2 Reactor for coating particles in stationary chamber with rotating paddles and gas injection Public/Granted day:2023-06-13
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