- 专利标题: RESISTIVE MEMORY WITH EMBEDDED METAL OXIDE FIN FOR GRADUAL SWITCHING
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申请号: US16394305申请日: 2019-04-25
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公开(公告)号: US20200343448A1公开(公告)日: 2020-10-29
- 发明人: Takashi Ando , Praneet Adusumilli , Jianshi Tang , Reinaldo Vega
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 主分类号: H01L45/00
- IPC分类号: H01L45/00 ; H01L27/24
摘要:
A method is presented for enabling heat dissipation in resistive random access memory (RRAM) devices. The method includes forming a first thermal conducting layer over a bottom electrode, depositing a metal oxide liner over the first thermal conducting layer, forming a second thermal conducting layer over the metal oxide liner, recessing the second thermal conducting layer to expose the first thermal conducting layer, and forming a top electrode in direct contact with the first and second thermal conducting layers.
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