发明申请
- 专利标题: SILANE COMPOUND
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申请号: US16995916申请日: 2020-08-18
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公开(公告)号: US20200377794A1公开(公告)日: 2020-12-03
- 发明人: Cheol Woo KIM , Yu Na SHIM , Kwang Kuk LEE , Young Bom KIM , Jin Kyung JO
- 申请人: SK Innovation Co., Ltd. , SK-Materials Co., Ltd.
- 申请人地址: KR Seoul KR Yeongju-si
- 专利权人: SK Innovation Co., Ltd.,SK-Materials Co., Ltd.
- 当前专利权人: SK Innovation Co., Ltd.,SK-Materials Co., Ltd.
- 当前专利权人地址: KR Seoul KR Yeongju-si
- 优先权: KR10-2018-0060001 20180526; KR10-2018-0127497 20181024
- 主分类号: C09K13/06
- IPC分类号: C09K13/06 ; H01L21/311 ; C07F7/02
摘要:
An etchant composition includes a silane compound represented by the following Chemical Formula 1: wherein R1 to R6 are independently hydrogen, halogen, a substituted or unsubstituted C1-C20 hydrocarbyl group, a phenyl group, a C1-C20 alkoxy group, a carboxy group, a carbonyl group, a nitro group, a tri(C1-C20) alkylsilyl group, a phosphoryl group, or a cyano group, L is a direct bond or C1-C3 hydrocarbylene, A is an n-valent radical, and n is an integer of 1 to 4.
公开/授权文献
- US11365350B2 Silane compound 公开/授权日:2022-06-21
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