Invention Application
- Patent Title: SEMICONDUCTOR DEVICE WITH TRANSISTOR LOCAL INTERCONNECTS
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Application No.: US17039187Application Date: 2020-09-30
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Publication No.: US20210013150A1Publication Date: 2021-01-14
- Inventor: Mahbub Rashed , Irene Y. Lin , Steven Soss , Jeff Kim , Chinh Nguyen , Marc Tarabbia , Scott Johnson , Subramani Kengeri , Suresh Venkatesan
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L21/8234 ; H01L27/02 ; H01L21/768 ; H01L21/285 ; H01L21/8238 ; H01L23/532 ; H01L27/092 ; H01L29/08

Abstract:
A semiconductor device is provided for implementing at least one logic element. The semiconductor device includes a semiconductor substrate. The first transistor and a second transistor are formed on the semiconductor substrate. Each transistor comprises a source, a drain, and a gate. The gate of the first transistor extends longitudinally as part of a first linear strip and the gate of the second transistor extends longitudinally as part of the second linear strip parallel to and spaced apart from the first linear strip. A first CB layer forms a local interconnect layer electrically connected to the gate of the first transistor. A second CB layer forms a local interconnect layer electrically connected to the gate of the second transistor. A CA layer forms a local interconnect layer extending longitudinally between a first end and a second end of the CA layer. The CA layer is electrically connected to the first and second CB layers. The first CB layer is electrically connected adjacent the first end of the CA layer and the second layer is electrically connected adjacent the second end of the CA layer. The first CB layer, the second CB layer and the CA layer are disposed between a first metal layer and the semiconductor substrate. The first metal layer being disposed above each source, each drain, and each gate of the first and second transistors. The CA layer extends substantially parallel to the first and second linear strips and is substantially perpendicular to the first and second CB layers. At least one via selectively provides an electrical connection between the CA or CB layers and the at least one metal layer.
Public/Granted literature
- US11444031B2 Semiconductor device with transistor local interconnects Public/Granted day:2022-09-13
Information query
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