Invention Application
- Patent Title: SEGMENTED PRINT BAR FOR LARGE-AREA OVJP DEPOSITION
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Application No.: US17062797Application Date: 2020-10-05
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Publication No.: US20210036225A1Publication Date: 2021-02-04
- Inventor: William E. QUINN , Gregory MCGRAW , Gregg KOTTAS
- Applicant: Universal Display Corporation
- Applicant Address: US NJ Ewing
- Assignee: Universal Display Corporation
- Current Assignee: Universal Display Corporation
- Current Assignee Address: US NJ Ewing
- Main IPC: H01L51/00
- IPC: H01L51/00 ; B05B1/00 ; H01L51/56 ; C23C14/22 ; C23C14/04 ; B41J2/155 ; C23C14/12

Abstract:
OVJP print bars are provided that include multiple print head segments, each of which includes a print head and which can be positioned relative to the substrate independently of each other print head segment. Accordingly, a more consistent head-to-substrate distance can be maintained even for substrates that are not uniformly planar.
Information query
IPC分类: