Invention Application
- Patent Title: OPTICAL DEVICE
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Application No.: US16625687Application Date: 2018-07-06
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Publication No.: US20210130159A1Publication Date: 2021-05-06
- Inventor: Tatsuya SUGIMOTO , Tomofumi SUZUKI , Kyosuke KOTANI
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Priority: JP2017-133093 20170706,JP2017-220237 20171115,JP2017-235021 20171207,JP2017-235022 20171207,JP2017-235025 20171207,JP2018-080743 20180419
- International Application: PCT/JP2018/025638 WO 20180706
- Main IPC: B81B3/00
- IPC: B81B3/00 ; G02B26/08 ; H02N1/00

Abstract:
An optical device includes a base that includes a main surface, a movable unit that includes an optical function unit, an elastic support unit that supports the movable unit so that the movable unit is movable along a predetermined direction perpendicular to the main surface, a fixed comb electrode that includes a plurality of fixed comb fingers, and a movable comb electrode that includes a plurality of movable comb fingers which are disposed alternately with the plurality of fixed comb fingers. At least one of the movable unit and the elastic support unit includes an electrode support portion that supports the movable comb electrode. The electrode support portion includes a rib portion that is formed so that the thickness of the electrode support portion in the predetermined direction is larger than the thickness of the movable comb fingers in the predetermined direction.
Public/Granted literature
- US12136893B2 Optical device having fixed and movable comb electrodes Public/Granted day:2024-11-05
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