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公开(公告)号：US20210155471A1
公开(公告)日：2021-05-27
申请号：US16625695
申请日：2018-07-06
摘要： An optical device includes an elastic support portion which includes a torsion bar which extends along a second direction perpendicular to a first direction and a nonlinearity relaxation spring which is connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A comb electrode is disposed along an outer edge of the movable portion.
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公开(公告)号：US20210191106A1
公开(公告)日：2021-06-24
申请号：US16761294
申请日：2018-08-02
摘要： A method for manufacturing an optical device includes: preparing a semiconductor substrate that includes a portion corresponding to a base, a movable unit, and an elastic support portion; forming a first resist layer in a region corresponding to the base on a surface of a first semiconductor layer which is opposite to an insulating layer; forming a depression in the first semiconductor layer by etching the first semiconductor layer using the first resist layer as a mask; forming a second resist layer in a region corresponding to a rib portion on a bottom surface of the depression, a side surface of the depression, and the surface of the first semiconductor layer which is opposite to the insulating layer; and forming the rib portion by etching the first semiconductor layer until reaching the insulating layer using the second resist layer as a mask.
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公开(公告)号：US20200049977A1
公开(公告)日：2020-02-13
申请号：US16492684
申请日：2018-03-14
摘要： An optical module includes a support layer, a device layer which is provided on the support layer, and a movable mirror which is mounted in the device layer. The device layer has a mounting region in which the movable mirror is mounted, and a driving region which is connected to the mounting region. A space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer. The mounting region is disposed between a pair of elastic support regions included in the driving region and is supported by the pair of elastic support regions.
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公开(公告)号：US20180120156A1
公开(公告)日：2018-05-03
申请号：US15792984
申请日：2017-10-25
发明人： Tomofumi SUZUKI , Kyosuke KOTANI
摘要： Provided is a position detection method including splitting detection light into first and second light, the first light being incident on a returning optical path, a portion of the first light being transmitted through a beam splitter and a remaining portion of the first light being reflected by the beam splitter to reach the beam splitter through a movable mirror every time the first light reaches the beam splitter through the movable mirror, combining the first light transmitted though the beam splitter and the second light to generate multiple interference light, extracting a second interference light signal having a wavelength of 1/p (p is a natural number) of a wavelength of detection light from a first interference light signal of the multiple interference light, and calculating a position of the movable portion in a predetermined direction based on the second interference light signal.
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公开(公告)号：US20240110779A1
公开(公告)日：2024-04-04
申请号：US18535364
申请日：2023-12-11
发明人： Tomofumi SUZUKI , Kyosuke KOTANI , Tatsuya SUGIMOTO , Yutaka KURAMOTO , Katsumi SHIBAYAMA , Noburo HOSOKAWA , Hirokazu YAMAMOTO , Takuo KOYAMA
IPC分类号： G01B9/02 , B81B3/00 , G01J3/02 , G01J3/10 , G01J3/14 , G01J3/45 , G02B7/182 , G02B26/08 , G02B27/14
CPC分类号： G01B9/02051 , B81B3/00 , B81B3/0021 , B81B3/007 , G01B9/02049 , G01J3/0202 , G01J3/021 , G01J3/0237 , G01J3/108 , G01J3/14 , G01J3/45 , G02B7/182 , G02B26/0816 , G02B26/0833 , G02B26/0841 , G02B27/144 , B81B2201/042 , B81B2203/0154 , G01J2003/104 , G01J3/4532
摘要： A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.
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公开(公告)号：US20210132367A1
公开(公告)日：2021-05-06
申请号：US16625685
申请日：2018-07-06
摘要： An optical device includes an elastic support portion which includes a torsion bar extending in a second direction perpendicular to a first direction and a nonlinearity relaxation spring connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A first comb finger of a first comb electrode and a second comb finger of a second comb electrode which are adjacent to each other face each other in the second direction.
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公开(公告)号：US20210132366A1
公开(公告)日：2021-05-06
申请号：US16492712
申请日：2018-03-14
摘要： An optical module includes a base which has a main surface and in which a mounting region and a driving region for moving the mounting region along a first direction parallel to the main surface are provided, a movable mirror which has a mirror surface having a positional relationship of intersecting the main surface and is mounted in the mounting region, a first fixed mirror which has a mirror surface having a positional relationship of intersecting the main surface and of which a position with respect to the base is fixed, and a beam splitter unit which constitutes a first interference optical system for measurement light together with the movable mirror and the first fixed mirror. The mirror surface of the movable mirror and the mirror surface of the first fixed mirror are directed to one side in the first direction.
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公开(公告)号：US20210130159A1
公开(公告)日：2021-05-06
申请号：US16625687
申请日：2018-07-06
摘要： An optical device includes a base that includes a main surface, a movable unit that includes an optical function unit, an elastic support unit that supports the movable unit so that the movable unit is movable along a predetermined direction perpendicular to the main surface, a fixed comb electrode that includes a plurality of fixed comb fingers, and a movable comb electrode that includes a plurality of movable comb fingers which are disposed alternately with the plurality of fixed comb fingers. At least one of the movable unit and the elastic support unit includes an electrode support portion that supports the movable comb electrode. The electrode support portion includes a rib portion that is formed so that the thickness of the electrode support portion in the predetermined direction is larger than the thickness of the movable comb fingers in the predetermined direction.
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公开(公告)号：US20240192483A1
公开(公告)日：2024-06-13
申请号：US18584740
申请日：2024-02-22
CPC分类号： G02B26/0841 , B81B3/0045 , B81C1/00555 , G02B7/1821 , G02B26/105 , H02N1/008 , B81B2201/042 , B81C2201/013 , B81C2201/0174 , B81C2201/0198
摘要： An optical device includes a support portion, a movable portion; and a pair of torsion bars. An optical function portion is provided on one surface of the movable portion and a rib portion is provided on the other surface of the movable portion. The rib portion includes eight extending portions of first to eighth extending portions. When setting directions in which the first to eighth extending portions extend as first to eighth extending directions respectively, and setting an angle between the first and second extending directions as a first angle, an angle between the third and fourth extending directions as a second angle, an angle between the fifth and sixth extending directions as a third angle, and an angle between the seventh and eighth extending directions as a fourth angle, each of the first and second angle is larger than each of the third and fourth angle.
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公开(公告)号：US20220099430A1
公开(公告)日：2022-03-31
申请号：US17426325
申请日：2020-01-17
IPC分类号： G01B9/02015 , G01J3/45
摘要： A processer of an optical module is configured to control a voltage signal having a frequency for causing a movable mirror to resonate, and perform an intensity acquisition process. The intensity acquisition process is a process of acquiring a measurement light intensity of the interference light of the measurement light M times at a first time interval based on the frequency in each of a plurality of cycles among P cycles continuous in the voltage signal, acquiring an addition value of a plurality of the measurement light intensities mutually corresponding for the same number of times, acquiring a laser light intensity of the interference light of the laser light N times at a second time interval based on the frequency in each of the plurality of cycles, and acquiring an addition value of a plurality of the laser light intensities mutually corresponding for the same number of times.
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