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    OPTICAL DEVICE
    1.
    发明申请
    OPTICAL DEVICE 有权

    公开(公告)号：US20210155471A1

    公开(公告)日：2021-05-27

    申请号：US16625695

    申请日：2018-07-06

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tatsuya SUGIMOTO ,  Tomofumi SUZUKI ,  Kyosuke KOTANI

    IPC: B81B3/00 ,  G02B26/08

    Abstract: An optical device includes an elastic support portion which includes a torsion bar which extends along a second direction perpendicular to a first direction and a nonlinearity relaxation spring which is connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A comb electrode is disposed along an outer edge of the movable portion.

    LIGHT DETECTION DEVICE
    2.
    发明申请
    LIGHT DETECTION DEVICE 有权
    光检测装置

    公开(公告)号：US20160254307A1

    公开(公告)日：2016-09-01

    申请号：US15150859

    申请日：2016-05-10

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Terumasa NAGANO ,  Noburo HOSOKAWA ,  Tomofumi SUZUKI ,  Takashi BABA

    IPC: H01L27/146 ,  H01L31/107

    CPC classification number: H01L27/14643 ,  H01L27/1446 ,  H01L27/14618 ,  H01L27/14636 ,  H01L27/14658 ,  H01L31/107

    Abstract: A light detection device 1 has a semiconductor light detection element having a semiconductor substrate, and a mounting substrate arranged as opposed to the semiconductor light detection element. The semiconductor light detection element includes a plurality of avalanche photodiodes operating in Geiger mode and formed in the semiconductor substrate, and electrodes electrically connected to the respective avalanche photodiodes and arranged on a second principal surface side of the semiconductor substrate. The mounting substrate includes a plurality of electrodes arranged corresponding to the respective electrodes on a third principal surface side, and quenching resistors electrically connected to the respective electrodes and arranged on the third principal surface side. The electrodes and the electrodes are connected through bump electrodes.

    Abstract translation: 光检测装置1具有半导体光检测元件，该半导体光检测元件具有半导体衬底和与半导体光检测元件相对布置的安装衬底。 半导体光检测元件包括以Geiger模式操作并形成在半导体衬底中的多个雪崩光电二极管，以及电连接到各个雪崩光电二极管并且布置在半导体衬底的第二主表面侧上的电极。 安装基板包括在第三主面侧对应于各个电极布置的多个电极，并且电连接到各个电极并且布置在第三主表面侧上的淬火电阻。 电极和电极通过凸块电极连接。

    OPTICAL DEVICE
    5.
    发明申请
    OPTICAL DEVICE 有权

    公开(公告)号：US20210132367A1

    公开(公告)日：2021-05-06

    申请号：US16625685

    申请日：2018-07-06

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tatsuya SUGIMOTO ,  Tomofumi SUZUKI ,  Kyosuke KOTANI

    IPC: G02B26/08 ,  G01J3/45 ,  B81B3/00

    Abstract: An optical device includes an elastic support portion which includes a torsion bar extending in a second direction perpendicular to a first direction and a nonlinearity relaxation spring connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A first comb finger of a first comb electrode and a second comb finger of a second comb electrode which are adjacent to each other face each other in the second direction.

    OPTICAL MODULE
    6.
    发明申请
    OPTICAL MODULE 有权

    公开(公告)号：US20210132366A1

    公开(公告)日：2021-05-06

    申请号：US16492712

    申请日：2018-03-14

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tomofumi SUZUKI ,  Kyosuke KOTANI ,  Tatsuya SUGIMOTO

    IPC: G02B26/08 ,  G01J3/02 ,  G01J3/45

    Abstract: An optical module includes a base which has a main surface and in which a mounting region and a driving region for moving the mounting region along a first direction parallel to the main surface are provided, a movable mirror which has a mirror surface having a positional relationship of intersecting the main surface and is mounted in the mounting region, a first fixed mirror which has a mirror surface having a positional relationship of intersecting the main surface and of which a position with respect to the base is fixed, and a beam splitter unit which constitutes a first interference optical system for measurement light together with the movable mirror and the first fixed mirror. The mirror surface of the movable mirror and the mirror surface of the first fixed mirror are directed to one side in the first direction.

    OPTICAL DEVICE
    7.
    发明申请
    OPTICAL DEVICE 有权

    公开(公告)号：US20210130159A1

    公开(公告)日：2021-05-06

    申请号：US16625687

    申请日：2018-07-06

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tatsuya SUGIMOTO ,  Tomofumi SUZUKI ,  Kyosuke KOTANI

    IPC: B81B3/00 ,  G02B26/08 ,  H02N1/00

    Abstract: An optical device includes a base that includes a main surface, a movable unit that includes an optical function unit, an elastic support unit that supports the movable unit so that the movable unit is movable along a predetermined direction perpendicular to the main surface, a fixed comb electrode that includes a plurality of fixed comb fingers, and a movable comb electrode that includes a plurality of movable comb fingers which are disposed alternately with the plurality of fixed comb fingers. At least one of the movable unit and the elastic support unit includes an electrode support portion that supports the movable comb electrode. The electrode support portion includes a rib portion that is formed so that the thickness of the electrode support portion in the predetermined direction is larger than the thickness of the movable comb fingers in the predetermined direction.

    LIGHT DETECTION DEVICE
    8.
    发明申请
    LIGHT DETECTION DEVICE 有权
    光检测装置

    公开(公告)号：US20160329455A1

    公开(公告)日：2016-11-10

    申请号：US15213629

    申请日：2016-07-19

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Terumasa NAGANO ,  Noburo HOSOKAWA ,  Tomofumi SUZUKI ,  Takashi BABA

    IPC: H01L31/107 ,  H01L49/02 ,  H01L27/146

    CPC classification number: H01L31/107 ,  G01J1/42 ,  G01T1/208 ,  H01L27/144 ,  H01L27/1443 ,  H01L27/14636 ,  H01L27/14643 ,  H01L27/14658 ,  H01L27/14663 ,  H01L28/20 ,  H01L31/02005 ,  H01L31/022408

    Abstract: A semiconductor light detection element includes a plurality of avalanche photodiodes operating in Geiger mode and formed in a semiconductor substrate, quenching resistors connected in series to the respective avalanche photodiodes and arranged on a first principal surface side of the semiconductor substrate, and a plurality of through-hole electrodes electrically connected to the quenching resistors and formed so as to penetrate the semiconductor substrate from the first principal surface side to a second principal surface side. A mounting substrate includes a plurality of electrodes arranged corresponding to the respective through-hole electrodes on a third principal surface side. The through-hole electrodes and the electrodes are electrically connected through hump electrodes, and a side surface of the semiconductor substrate and a side surface of a glass substrate are flush with each other.

    Abstract translation: 半导体光检测元件包括以Geiger模式操作并形成在半导体衬底中的多个雪崩光电二极管，与各个雪崩光电二极管串联连接并设置在半导体衬底的第一主表面侧上的骤冷电阻器，以及多个通孔 电极连接到淬火电阻器并形成为从第一主表面侧穿过半导体衬底到第二主表面侧的电极。 安装基板包括在第三主表面侧对应于相应的通孔电极布置的多个电极。 通孔电极和电极通过隆起电极电连接，半导体衬底的侧表面和玻璃衬底的侧表面彼此齐平。

    OPTICAL MODULE, SIGNAL PROCESSING SYSTEM, AND SIGNAL PROCESSING METHOD
    10.
    发明申请
    OPTICAL MODULE, SIGNAL PROCESSING SYSTEM, AND SIGNAL PROCESSING METHOD 有权

    公开(公告)号：US20220099430A1

    公开(公告)日：2022-03-31

    申请号：US17426325

    申请日：2020-01-17

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tomofumi SUZUKI ,  Yuya IWAZAKI ,  Kyosuke KOTANI ,  Tatsuya SUGIMOTO ,  Hiromichi TOZUKA

    IPC: G01B9/02015 ,  G01J3/45

    Abstract: A processer of an optical module is configured to control a voltage signal having a frequency for causing a movable mirror to resonate, and perform an intensity acquisition process. The intensity acquisition process is a process of acquiring a measurement light intensity of the interference light of the measurement light M times at a first time interval based on the frequency in each of a plurality of cycles among P cycles continuous in the voltage signal, acquiring an addition value of a plurality of the measurement light intensities mutually corresponding for the same number of times, acquiring a laser light intensity of the interference light of the laser light N times at a second time interval based on the frequency in each of the plurality of cycles, and acquiring an addition value of a plurality of the laser light intensities mutually corresponding for the same number of times.

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