- 专利标题: METHODS AND APPARATUS FOR MEASURING EDGE RING TEMPERATURE
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申请号: US16707945申请日: 2019-12-09
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公开(公告)号: US20210175101A1公开(公告)日: 2021-06-10
- 发明人: JI-DIH HU , WOLFGANG R. ADERHOLD , DONGMING IU
- 申请人: APPLIED MATERIALS, INC.
- 申请人地址: US CA Santa Clara
- 专利权人: APPLIED MATERIALS, INC.
- 当前专利权人: APPLIED MATERIALS, INC.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: H01L21/67
- IPC分类号: H01L21/67 ; G01K7/01
摘要:
An apparatus for measuring a temperature of an assembly that is internal to a process chamber. The apparatus may include a light pipe positioned between a lamp radiation filtering window and the assembly, the light pipe has a first end with a bevel configured to redirect infrared radiation emitted from the assembly through the light pipe and has a second end distal to the first end, an optical assembly configured to collimate, filter, and focus infrared radiation from the second end of the light pipe, an optical detector configured to receive an output from the optical assembly and generate at least one signal representative of the infrared radiation, a temperature circuit that transforms the at least one signal into a temperature value, and a controller that is configured to receive the temperature value and to make adjustments to other process parameters of process chamber based on the temperature value.
公开/授权文献
- US11342209B2 Methods and apparatus for measuring edge ring temperature 公开/授权日:2022-05-24