- 专利标题： SUBSTRATE POSITIONING DEVICE WITH REMOTE TEMPERATURE SENSOR
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申请号： US17257900申请日： 2019-06-27
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公开(公告)号： US20210272829A1公开(公告)日： 2021-09-02
- 发明人: Patriek Adrianus Alphonsus Maria BRUURS , Dennis Herman Caspar VAN BANNING , Jan-Gerard Cornelis VAN DER TOORN , Edwin Cornelis KADIJK
- 申请人： ASML NETHERLANDS B.V.
- 申请人地址： NL Veldhoven
- 专利权人： ASML NETHERLANDS B.V.
- 当前专利权人： ASML NETHERLANDS B.V.
- 当前专利权人地址： NL Veldhoven
- 优先权： EP18185349.0 20180724,EP19169077.5 20190412
- 国际申请： PCT/EP2019/067152 WO 20190627
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; H01J37/244 ; H01J37/20 ; H01L21/68 ; G01K11/125 ; G01K1/14
摘要：
A stage apparatus including: an object table configured to hold an object; a positioning device configured to position the object table and the object held by the object table; and a remote temperature sensor configured to measure a temperature of the object table and/or the object, wherein the remote temperature sensor comprises a passive temperature sensing element.
公开/授权文献
- US12051607B2 Substrate positioning device with remote temperature sensor 公开/授权日：2024-07-30
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